Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering von Kim, E., Engwall, A.M., Merlo, J.B., Shin, S.J., Goodelman, D.C., Baker, A.A., Taylor, G.V., Kucheyev, S.O., Bayu Aji, L.B.

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