A laboratory X-ray microscopy study of cracks in on-chip interconnect stacks of integrated circuits von Kutukova, K., Niese, S., Sander, C., Standke, Y., Gluch, J., Gall, M., Zschech, E.

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Porous sandwich ceramic of layered silicon nitride-zirconia composite with various multilayered graphene content von Balázsi, K., Furkó, M., Liao, Z., Gluch, J., Medved, D., Sedlák, R., Dusza, J., Zschech, E., Balázsi, C.

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Study of mechanical behavior of AFM silicon tips under mechanical load von Kopycinska-Mueller, M, Gluch, J, Köhler, B

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Sub 25 nm focusing with a long working distance using multilayer Laue lenses von Kubec, A., Niese, S., Rosenthal, M., Gluch, J., Burghammer, M., Gawlitza, P., Keckes, J., Leson, A.

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Electrical Evaluation of Ru–W(-N), Ru–Ta(-N) and Ru–Mn films as Cu diffusion barriers von Wojcik, H., Kaltofen, R., Merkel, U., Krien, C., Strehle, S., Gluch, J., Knaut, M., Wenzel, C., Preusse, A., Bartha, J.W., Geidel, M., Adolphi, B., Neumann, V., Liske, R., Munnik, F.

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Electrical characterisation of HfYO MIM-structures deposited by ALD von Roessler, T., Gluch, J., Albert, M., Bartha, J.W.

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Microstructure and stress in high- k Hf–Y–O thin films von Gluch, J., Rößler, T., Menzel, S.B., Eckert, J.

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Unveiling the Interplay of Structural and Electrochemical Degradation of LiNi0.85Mn0.05Co0.05O2 Cathode Material for Li-Ion Batteries von Goldbach, D., Gluch, J., Gaus, M., Graf, T., Käbitz, S., Krewer, U.

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Unveiling the Interplay of Structural and Electrochemical Degradation of LiNi 0.85 Mn 0.05 Co 0.05 O 2 Cathode Material for Li-Ion Batteries von Goldbach, D., Gluch, J., Gaus, M., Graf, T., Käbitz, S., Krewer, U.

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30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film von Keckes, J., Daniel, R., Todt, J., Zalesak, J., Sartory, B., Braun, S., Gluch, J., Rosenthal, M., Burghammer, M., Mitterer, C., Niese, S., Kubec, A.

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TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method von Gluch, J., Rößler, T., Schmidt, D., Menzel, S.B., Albert, M., Eckert, J.

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Electron and X-ray Tomography of Iron/Iron Oxide Redox Reactions for Large-Scale Hydrogen Storage von Gluch, J., Niese, S., Jung, C., Röntzsch, L., Zschech, E., Kieback, B.

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Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements von Wojcik, H., Merkel, U., Jahn, A., Richter, K., Junige, M., Klein, C., Gluch, J., Albert, M., Munnik, F., Wenzel, C., Bartha, J.W.

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Analysis of Possible Application of High-Temperature Nuclear Reactors to Contemporary Large-Output Steam Power Plants on Ships von Kowalczyk, T., Głuch, J., Ziółkowski, P.

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Laboratory Computed X-Ray Tomography – A Nondestructive Technique for 3D Microstructure Analyis of Materials von Zschech, E., Löffler, M., Krüger, P., Gluch, J., Kutukova, K., Zgłobicka, I., Silomon, J., Rosenkranz, R., Standke, Y., Topal, E.

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Laboratory Computed X-Ray Tomography – A Nondestructive Technique for 3D Microstructure Analyis of Materials: The working group “X-Ray Tomography” is headed by Prof. Dr. Ehrenfried... von Zschech, E., Löffler, M., Krüger, P., Gluch, J., Kutukova, K., Zgłobicka, I., Silomon, J., Rosenkranz, R., Standke, Y., Topal, E.

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Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties von Wojcik, H., Junige, M., Bartha, W., Albert, M., Neumann, V., Merkel, U., Peeva, A., Gluch, J., Menzel, S., Munnik, F., Liske, R., Utess, D., Richter, I., Klein, C., Engelmann, H. J., Ho, P., Hossbach, C., Wenzel, C.

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Multi-scale radiographic applications in microelectronic industry von Gluch, J., Löffler, M., Meyendorf, N., Oppermann, M., Röllig, M., Sättler, P., Wolter, K. J., Zschech, E.

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Pediatric Obesity and Oral Heath: Guilty by Association? von Pinto, A, Larsen, S, Yang, W, Valdivieso, S, Gluch, J

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An experimental methodology for the in-situ observation of the time-dependent dielectric breakdown mechanism in Copper/low-k on-chip interconnect structures von Kong Boon Yeap, Gall, M., Sander, C., Niese, S., Zhongquan Liao, Ritz, Y., Rosenkranz, R., Muhle, U., Gluch, J., Zschech, E., Aubel, O., Beyer, A., Hennesthal, C., Hauschildt, M., Talut, G., Poppe, J., Vogel, N., Engelmann, H., Stauffer, D., Major, R., Warren, O.

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