A micro dew point sensor with a thermal detection principle von Kunze, M, Merz, J, Hummel, W-J, Glosch, H, Messner, S, Zengerle, R

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Thermal flow sensor for liquids and gases based on combinations of two principles von Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., Lang, W.

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Micromachined inclinometer with high sensitivity and very good stability von Billat, S., Glosch, H., Kunze, M, Hedrich, F., Frech, J., Auber, J., Sandmaier, H., Wimmer, W, Lang, W.

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A thermoelectric converter for energy supply von Glosch, H, Ashauer, M, Pfeiffer, U, Lang, W

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Convection-based micromachined inclinometer using SOI technology von Billat, S., Glosch, H., Kunze, M., Hedrich, F., Frech, J., Auber, J., Lang, W., Sandmaier, H., Wimmer, W.

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Thermal characterization of microsystems by means of high-resolution thermography von Ashauer, M., Ende, J., Glosch, H., Haffner, H., Hiltmann, K.

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Humidity measurement by dynamic dew-point detection von Lang, W., Glosch, H., Billat, S., Querrioux, T., Kunze, M., Ashauer, M., Sandmaier, H.

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Thermal flow sensor for liquids and gases von Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., Lang, W.

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Thermal flow sensor for liquids and gases based on combinations of two principles: Special Issue of the Micromechanics Section of Sensors and Actuators, based on contributions revi... von ASHAUER, M, GLOSCH, H, HEDRICH, F, HEY, N, SANDMAIER, H, LANG, W

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