Molecular dynamics study on the role of Ar ions in the sputter deposition of Al thin films von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks von Gergs, Tobias, Borislavov, Borislav, Trieschmann, Jan

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A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits von Schmidt, Frederik, Trieschmann, Jan, Gergs, Tobias, Mussenbrock, Thomas

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Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations von Krüger, Florian, Gergs, Tobias, Trieschmann, Jan

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Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N 2 discharges on experimental timescales von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N2 discharges on experimental timescales von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Generalized Method for Charge-Transfer Equilibration in Reactive Molecular Dynamics von Gergs, Tobias, Schmidt, Frederik, Mussenbrock, Thomas, Trieschmann, Jan

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Nanoporous SiOx plasma polymer films as carrier for liquid‐infused surfaces von Gergs, Tobias, Monti, Chiara, Gaiser, Sandra, Amberg, Martin, Schütz, Urs, Mussenbrock, Thomas, Trieschmann, Jan, Heuberger, Manfred, Hegemann, Dirk

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PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth von Arcos, Teresa, Awakowicz, Peter, Benedikt, Jan, Biskup, Beatrix, Böke, Marc, Boysen, Nils, Buschhaus, Rahel, Dahlmann, Rainer, Devi, Anjana, Gergs, Tobias, Jenderny, Jonathan, Keudell, Achim, Kühne, Thomas D., Kusmierz, Simon, Müller, Hendrik, Mussenbrock, Thomas, Trieschmann, Jan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

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PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films von Arcos, Teresa, Awakowicz, Peter, Böke, Marc, Boysen, Nils, Brinkmann, Ralf Peter, Dahlmann, Rainer, Devi, Anjana, Eremin, Denis, Franke, Jonas, Gergs, Tobias, Jenderny, Jonathan, Kemaneci, Efe, Kühne, Thomas D., Kusmierz, Simon, Mussenbrock, Thomas, Rubner, Jens, Trieschmann, Jan, Wessling, Matthias, Xie, Xiaofan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

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Machine learning for advancing low-temperature plasma modeling and simulation von Trieschmann, Jan, Vialetto, Luca, Gergs, Tobias

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Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films von Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan

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An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks von Gergs, Tobias, Borislavov, Borislav, Trieschmann, Jan

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Wedge-type engineered analog SiO$_\mathrm{x}$/Cu/SiO$_\mathrm{x}$-Memristive Devices for Neuromorphic Applications von Lamprecht, Rouven, Vialetto, Luca, Gergs, Tobias, Zahari, Finn, Marquardt, Richard, Trieschmann, Jan, Kohlstedt, Hermann

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Physics-based Modeling and Simulation of Nanoparticle Networks von Hemke, Torben, Struck, Robin, Yarragolla, Sahitya, Gergs, Tobias, Trieschmann, Jan, Mussenbrock, Thomas

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