Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art von Grill, Alfred, Gates, Stephen M., Ryan, Todd E., Nguyen, Son V., Priyadarshini, Deepika

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Sequential Lateral Solidification of Silicon Thin Films on Cu BEOL-Integrated Wafers for Monolithic 3-D Integration von Carta, Fabio, Gates, Stephen M., Limanov, Alexander B., Im, James S., Edelstein, Daniel C., Kymissis, Ioannis

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Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials von Gates, Stephen M

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Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects von Todd Ryan, E., Gates, Stephen M., Cohen, Stephan A., Ostrovski, Yuri, Adams, Ed, Virwani, Kumar, Grill, Alfred

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Sequential lateral solidification of silicon thin films on low-k dielectrics for low temperature integration von Carta, Fabio, Gates, Stephen M., Limanov, Alexander B., Hlaing, Htay, Im, James S., Edelstein, Daniel C., Kymissis, Ioannis

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Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage von Ryan, E. Todd, Gates, Stephen M., Grill, Alfred, Molis, Steven, Flaitz, Philip, Arnold, John, Sankarapandian, Muthumanickam, Cohen, Stephan A., Ostrovski, Yuri, Dimitrakopoulos, Christos

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Detection of open or closed porosity in low- κ dielectrics by solvent diffusion von Worsley, Marcus A., Roberts, Mark, Bent, Stacey F., Gates, Stephen M., Shaw, Thomas, Volksen, Willi, Miller, Robert

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Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface von Gates, Stephen M.

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Subscapularis integrity, function and EMG/nerve conduction study findings following reverse total shoulder arthroplasty von Khazzam, Michael, Reyes, Bryan, Phelan, Amy, Gates, Stephen

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Incidence and predictors of positive intraoperative cultures in primary shoulder arthroplasty following prior ipsilateral shoulder surgery von Gates, Stephen, Nguyen, Ivy, Del Core, Michael, Nakonezny, Paul A., Bradley, Hallie, Khazzam, Michael

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Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistry von Jasinski, Joseph M, Gates, Stephen M

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Property modifications of nanoporous p SiCOH dielectrics to enhance resistance to plasma-induced damage von Ryan, E. Todd, Gates, Stephen M., Grill, Alfred, Molis, Steven, Flaitz, Philip, Arnold, John, Sankarapandian, Muthumanickam, Cohen, Stephan A., Ostrovski, Yuri, Dimitrakopoulos, Christos

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Layered substrate structures with aligned optical access to electrical devices von Petrarca, Kevin Shawn, Adiga, Vivekananda P, Budd, Russell A, Gates, Stephen M, Gill, Douglas Max

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The Effect of Material and Process Interactions on BEOL Integration von Spooner, Terry A., Arnold, John C., Canaperi, Donald, Chen, James, Chen, Shyng-Tsong, Gates, Stephen M., Isobayashi, Atsunobu, Leung, Pak, Papa Rao, Satyavolu S., Sankarapandian, Muthumanickam, Shobha, Hosadurga, Van der Straten, O.

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ANTI-FUSE AND FUSE STRUCTURES USING ANISOTROPIC ETCHING OF THE SUBSTRATE USING A PATTERN OF ETCH RELEASE HOLES FOR IMPROVING THE FUNCTIONALITY OF QUBIT CIRCUITS von Adiga, Vivekananda P, Budd, Russell A, Rettner, Charles Thomas, Gates, Stephen M

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ANTI-FUSE AND FUSE STRUCTURES FOR IMPROVING THE FUNCTIONALITY OF QUBIT CIRCUITS von Adiga, Vivekananda P, Budd, Russell A, Rettner, Charles Thomas, Gates, Stephen M

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ANTI-FUSE AND FUSE STRUCTURES FOR IMPROVING THE FUNCTIONALITY OF QUBIT CIRCUITS von Adiga, Vivekananda P, Budd, Russell A, Rettner, Charles Thomas, Gates, Stephen M

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Detection of open or closed porosity in IOW-K dielectrics by solvent diffusion von Worsley, Marcus A, Roberts, Mark, Bent, Stacey F, Gates, Stephen M, Shaw, Thomas, Volksen, Willi, Miller, Robert

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Microwave-to-optical quantum transducers von Kamlapurkar, Swetha, Donaton, Ricardo Alves, Falk, Abram L, Orcutt, Jason S, Gates, Stephen M, Xiong, Chi

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MICROWAVE-TO-OPTICAL QUANTUM TRANSDUCERS von KAMLAPURKAR, SWETHA, Donaton, Ricardo Alves, Falk, Abram L, Orcutt, Jason S, Gates, Stephen M, Xiong, Chi

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