In-line defect reduction from a historical perspective and its implications for future integrated circuit manufacturing von Guldi, R.L.

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Effect of Device Processing Conditions on Extended Dislocations and Defects in Ti‐Salicided Source/Drain Regions of Silicon Integrated Circuits von Guldi, R. L.

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Strategy and metrics for wafer handling automation in legacy semiconductor fab von Guldi, R.L., Paradis, D.E., Whitfield, M.T., Poag, F.D., Jensen, D.P.

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Characterization of poly-buffered LOCOS in manufacturing environment von GULDI, R. L, MCKEE, B, DAMMINGA, G. M, YOUNG, C. Y, BEALS, M. A

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Characterization of copper voids in damascene processes von Guldi, R.L., Shaw, J.B., Ritchison, J., Corum, D.L., Oestreich, S., Sherman, K., Lin, J.H., Fiordalice, R.

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Source/Drain Dislocations and Electrical Leakage in Titanium‐Salicided CMOS Integrated Circuits von Guldi, R. L.

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Repair of plasma etch related gate perimeter damage using low temperature oxidation von GULDI, R. L, WYKE, D. R

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Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness von Guldi, R.L., Jenkins, C.D., Oamminga, G.M., Baum, T.A., Foster, T.A.

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Antimony Diffusion Into p-Type Pb1-xSnxTe von Guldi, R L, Antcliffe, G A

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Effects of Multiple Slice Epitaxy and Front End Processing on Generation Threshold Current in Bubble Memory Devices von Guldi, R. L., Fontana, R. E., Bullock, D. C.

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Diffusion of lead and selenium in lead selenide von Guldi, R. L., Walpole, J. N., Rediker, R. H.

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A multi-pronged approach to defect management von Paradis, D.E., Guldi, R.L., Lalena, J.N., Ritchison, J.W.

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Antimony Diffusion into P-Type Pb[sub 1−x]Sn[sub x]Te von Guldi, R. L., Antcliffe, G. A.

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Nickel SALICIDE Process Technology for CMOS Devices of 90nm Node and Beyond von Lu, J.P., Miles, D.S., DeLoach, J., Yue, D.F., Chen, P.J., Bonifield, T., Crank, S., Yu, S.F., Mehrad, F., Obeng, Y., Ramappa, D.A., Corum, D., Guldi, R.L., Robertson, L.S., Liu, X., Hall, L.H., Xu, Y.Q., Lin, B.Y., Griffin, A.F.Jr, Johnson, F.S., Grider, T., Mercer, D., Montgomery, C.

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Diffusion of Pb and Se in PbSe von Guldi, R L, Walpole, J N, Rediker, R H

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Understanding and eliminating defects in electroplated Cu films von Lu, J.P., Chen, L., Gonzalez, D., Guo, H.L., Rose, D.J., Marudachalam, M., Hsu, W.U., Liu, H.Y., Cataldi, F., Chatterjee, B., Smith, P.B., Holverson, P., Guldi, R.L., Russell, N.M., Shinn, G., Zuhoski, S., Luttmer, J.D.

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Fused Hexabenzocoronene‐Porphyrin Conjugates with Tailorable Excited‐State Lifetimes von Oleszak, Christoph, Schol, Peter R., Ritterhoff, Christian L., Krug, Marcel, Martin, Max M., Bo, Yifan, Meyer, Bernd, Clark, Timothy, Guldi, Dirk M., Jux, Norbert

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Combining Single Wall Carbon Nanotubes and Photoactive Polymers for Photoconversion von Rahman, G. M. Aminur, Guldi, Dirk M, Cagnoli, Rita, Mucci, Adele, Schenetti, Luisa, Vaccari, Lisa, Prato, Maurizio

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Fused Hexabenzocoronene‐Porphyrin Conjugates with Tailorable Excited‐State Lifetimes von Oleszak, Christoph, Schol, Peter R., Ritterhoff, Christian L., Krug, Marcel, Martin, Max M., Bo, Yifan, Meyer, Bernd, Clark, Timothy, Guldi, Dirk M., Jux, Norbert

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Synthesis, Characterization, and Photoinduced Energy and Electron Transfer in a Supramolecular Tetrakis (Ruthenium(II) Phthalocyanine) Perylenediimide Pentad von Jiménez, Angel J., Grimm, Bruno, Gunderson, Victoria L., Vagnini, Michael T., Krick Calderon, Sandra, Rodríguez-Morgade, M. Salomé, Wasielewski, Michael R., Guldi, Dirk M., Torres, Tomás

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