(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures von Chen, Han-Wen, Verhaverbeke, Steven, Gouk, Roman, Leschkies, Kurtis, Sun, Shiyu, Bekiaris, Nikos, Visser, Robert J.

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Contactless bottom-up electrodeposition of nickel for 3D integrated circuits von Zhao, Mingrui, Balachandran, Rajesh, Patterson, Zach, Gouk, Roman, Verhaverbeke, Steven, Shadman, Farhang, Keswani, Manish

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Methods of forming microvias with reduced diameter von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman

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Mechanism and Principles of Post Etch Al Cleaning with Inorganic Acids von Papanu, Jim, Chen, Han Wen, Gouk, Roman, Verhaverbeke, Steven

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Methods Of Forming Microvias With Reduced Diameter von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman

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Fluoropolymer stamp fabrication method von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman, Delmas, Jean

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Methods of forming microvias with reduced diameter von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman

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Methods Of Forming Microvias With Reduced Diameter von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman

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Process and chemistry of plating of through silicon vias von Gouk Roman, Verhaverbeke Steven

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Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures von Chen, Han-Wen, Verhaverbeke, Steven, Gouk, Roman

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METHOD AND APPARATUS FOR LASER DRILLING BLIND VIAS von LEI, Wei-Sheng, VERHAVERBEKE, Steven, GOUK, Roman, SIVARAMAKRISHNAN, Visweswaren, LESCHKIES, Kurtis

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Fluoropolymer stamp fabrication method von Verhaverbeke, Steven, Buch, Chintan, Gouk, Roman, Delmas, Jean

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PROCESS AND CHEMISTRY OF PLATING OF THROUGH SILICON VIAS von VERHAVERBEKE, Steven, GOUK, Roman

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Drying process for high aspect ratio features von Chen, Han-Wen, Verhaverbeke, Steven, Gouk, Roman, Delmas, Jean

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SUBSTRATE CARRIER PLATE von STEVEN VERHAVERBEKE, ROMAN GOUK

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METHODS OF MICRO-VIA FORMATION FOR ADVANCED PACKAGING von LEI, Wei-Sheng, VERHAVERBEKE, Steven, CHAKRABORTY, Tapash, GOUK, Roman, CHO, Kyuil, CHEN, Han-Wen, PARK, Giback, LESCHKIES, Kurtis

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FLUOROPOLYMER STAMP FABRICATION METHOD von VERHAVERBEKE, Steven, GOUK, Roman, DELMAS, Jean, BUCH, Chintan

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METHOD AND APPARATUS FOR LASER DRILLING BLIND VIAS von LEI, Wei-Sheng, VERHAVERBEKE, Steven, GOUK, Roman, SIVARAMAKRISHNAN, Visweswaren, LESCHKIES, Kurtis

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Using Megasonics for Particle and Residue Removal in Single Wafer Cleaning von Gouk, Roman, Verhaverbeke, Steven, Yost, Dennis

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Process and chemistry of plating of through silicon vias von GOUK, ROMAN, VERHAVERBEKE, STEVEN

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