Influence of the rapid thermal treatment of the gate dielectric on the parameters of integrated circuits of time devices von Saladukha, V. A., Pilipenko, V. A., Gorushko, V. A.

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Electron-microscope investigations of the Pt-Si system during its rapid thermal treatment von Saladukha, V. A., Pilipenko, V. A., Komarov, F. F., Gorushko, V. A.

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INFLUENCE OF TIME MODES OF THERMAL TREATMENT ON Pt-Si SYSTEM MICROSTRUCTURE von Saladukha, V. A., Pilipenko, V. A., Komarov, F. F., Gorushko, V. A.

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Reliability Express Control of the Gate Dielectric of Semiconductor Devices von Solodukha, V. A., Chigir, G. G., Pilipenko, V. A., Filipenya, V. A., Gorushko, V. A.

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Cleaning of the surface of silicon structures in the technology of very large-scale integrated circuits with the use of rapid heat treatment von PILIPENKO, V. A, PONOMAR', V. N, GORUSHKO, V. A

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Removal of photoresist masks with the use of rapid heat treatment von PILIPENKO, V. A, PONOMAR', V. N, GORUSHKO, V. A

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Influence of Fast Thermal Treatment on the Electrophysical Properties of Silicon Dioxide von Pilipenko, V. A., Solodukha, V. A., Gorushko, V. A.

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Rapid thermal treatment modes of the Рt-Si system for formation of platinum silicide von V. A. Solodukha, V. A. Pilipenko, V. A. Gorushko

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The impact of formation modes of platinum silicide by the quick heat treatment on Schottky diodes parameters von V. A. Saladukha, V. A. Pilipenko, V. A. Gorushko, V. A. Philipenya

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Properties of a silicon surface exposed to nanosecond laser-radiation pulses von Pilipenko, V. A., Vecher, D. V., Gorushko, V. A., Syakerskii, V. S., Petlitskaya, T. V.

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Modeling of the parameters of bipolar transistors von Pilipenko, V A, Vecher, D V, Gorushko, V A, Petlitskaya, T V, Syakerskii, V S

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Model of Laser Gettering of Fast-Diffusing Impurities von Pilipenko, V. A., Ponomar', V. N., Gorushko, V. A.

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Influence of rapid thermal treatment of the gate dielectric on the parameters of power field МОSFЕТ transistors von V. A. Solodukha, U. A. Pilipenko, V. A. Gorushko

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Modeling of Diffusion Synthesis of Titanium Disilicide von Pilipenko, V A, Molofeev, V V, Ponomar, V N, Mikhnyuk, A N, Gorushko, V A

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Control of the properties of thin-film systems with the use of pulsed photon treatment von PILIPPENKO, V. A, PONOMAR', V. N, GORUSHKO, V. A

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METHOD AND CONTROL SET-UP OF SILICON WAFER FLATNESS von V. A. Pilipenko, A. N. Petlitsky, V. A. Gorushko, S. V. Shvedov, V. V. Ponaryadov

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