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  1. 1
    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device von HOUBEN DENNIS ANDREAS PETRUS HUBERTINA, GOOSSENS JEFFREY HENDRIKUS PETER MARIA, SIMONS WILHELMUS FRANCISCUS JOHANNES, HEERTJES MARCEL FRANCOIS

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  2. 2
    CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE

    CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE von GOOSSENS JEFFREY HENDRIKUS PETER MARIA, HEERTJES MARCEL FRANCOIS, SIMONS WILHELMUS FRANCISCUS JOHANNE, HOUBEN DENNIS, ANDREAS PETRUS HUBERTINA

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  3. 3
    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device von Heertjes, Marcel François, Simons, Wilhelmus Franciscus Johannes, Houben, Dennis Andreas Petrus Hubertina, Goossens, Jeffrey Hendrikus Peter Maria

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  4. 4
    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device von HOUBEN DENNIS ANDREAS PETRUS HUBERTINA, GOOSSENS JEFFREY HENDRIKUS PETER MARIA, SIMONS WILHELMUS FRANCISCUS JOHANNES, HEERTJES MARCEL FRANCOIS

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  5. 5
    CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE

    CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE von HUBERTINA, HOUBEN DENNIS ANDREAS PETRUS, MARIA GOOSSENS JEFFREY HENDRIKUS PETER, HEERTJES MARCEL FRANCOIS, JOHANNES SIMONS WILHELMUS FRANCISCUS

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  6. 6
    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

    Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device von MARCEL FRANCOIS HEERTJES, WILHELMUS FRANCISCUS JOHANNES SIMONS, DENNIS ANDREAS PETRUS HUBERTINA HOUBEN, JEFFREY HENDRIKUS PETER MARIA GOOSSENS

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