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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Mills, Lynne K, Waeterloos, Joost J. M, Wilson, Larry R, Shaffer, Edward O. II, Townsend, Paul H. III, Gombar-Fetner, Sheila, Hetzner, Jack E, Howard, Kevin E

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von TOWNSEND, III PAUL H, MILLS LYNNE K, GOMBAR-FETNER SHEILA

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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von SHAFFER EDWARD O.II, MILLS LYNNE K, GOMBAR-FETNER SHEILA, WAETERLOOS JOOST J.M, HETZNER JACK E, HOWARD KEVIN E, TOWNSEND PAUL H.III

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von WAETERLOOS JOOST J. M, TOWNSEND PAUL H, WILSON LARRY R.?, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E

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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Shaffer, II, Edward O, Howard, Kevin E, Waeterloos, Joost J. M, Hetzner, Jack E, Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila, Wilson, Larry R

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von WAETERLOOS JOOST J. M, SHAFFER, II EDWARD O, TOWNSEND, III PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, HOWARD KEVIN E

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Shaffer, Edward, Howard, Kevin, Waeterloos, Joost, Hetzner, Jack, Townsend, Paul, Mills, Lynne, Gombar-Fetner, Sheila, Wilson, Larry

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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von TOWNSEND PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, WAETERLOOS JOOST J.M, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E

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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN THE FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Mills, Lynne K, Waeterloos, Joost J. M, Wilson, Larry R, Shaffer, Edward O. II, Townsend, Paul H. III, Gombar-Fetner, Sheila, Hetzner, Jack E, Howard, Kevin E

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von TOWNSEND, III PAUL H, MILLS LYNNE K, GOMBAR-FETNER SHEILA

Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von SHAFFER EDWARD O.II, MILLS LYNNE K, GOMBAR-FETNER SHEILA, WAETERLOOS JOOST J.M, HETZNER JACK E, HOWARD KEVIN E, TOWNSEND PAUL H.III

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von WAETERLOOS JOOST J. M, TOWNSEND PAUL H, WILSON LARRY R.?, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E

Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Shaffer, II, Edward O, Howard, Kevin E, Waeterloos, Joost J. M, Hetzner, Jack E, Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila, Wilson, Larry R

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von WAETERLOOS JOOST J. M, SHAFFER, II EDWARD O, TOWNSEND, III PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, HOWARD KEVIN E

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von Shaffer, Edward, Howard, Kevin, Waeterloos, Joost, Hetzner, Jack, Townsend, Paul, Mills, Lynne, Gombar-Fetner, Sheila, Wilson, Larry

Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices von TOWNSEND PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, WAETERLOOS JOOST J.M, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E

ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN THE FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES von HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M

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