A Process for Topographically Selective Deposition on 3D Nanostructures by Ion Implantation von Kim, Woo-Hee, Minaye Hashemi, Fatemeh Sadat, Mackus, Adriaan J. M, Singh, Joseph, Kim, Yeongin, Bobb-Semple, Dara, Fan, Yin, Kaufman-Osborn, Tobin, Godet, Ludovic, Bent, Stacey F

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1.2: Invited Paper: Creating a high quality optical experience for Augmented Reality Devices von Visser, Robert Jan, Godet, Ludovic, Patibandla, Nag

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Atomic Layer Deposition of Pt on the Surface Deactivated by Fluorocarbon Implantation: Investigation of the Growth Mechanism von Kim, Woo-Hee, Shin, Kihyun, Shong, Bonggeun, Godet, Ludovic, Bent, Stacey F

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43‐5: Invited Paper: Enabling High Performance AR Waveguide Display with Semiconductor Manufacturing Technologies von Bhargava, Samarth, Hourani, Rami, Xu, Yongan, Fu, Jinxin, Visser, Robert, Godet, Ludovic

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51‐2: Invited Paper: Developing a Platform for Creating Waveguide Combiners for AR Headsets and Metasurface‐based Optics von Godet, Ludovic, Thijssen, Rutger, Fu, Jinxin, Hourani, Rami, Doshay, Sage, Visser, Robert J

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Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications von Bergsman, David S., Baker, Jon G., Closser, Richard G., MacIsaac, Callisto, Lillethorup, Mie, Strickler, Alaina L., Azarnouche, Laurent, Godet, Ludovic, Bent, Stacey F.

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Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications von Bergsman, David S., Baker, Jon G., Closser, Richard G., MacIsaac, Callisto, Lillethorup, Mie, Strickler, Alaina L., Azarnouche, Laurent, Godet, Ludovic, Bent, Stacey F.

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Low energy ion implantation using non-equilibrium glow discharge von Radovanov, Svetlana, Godet, Ludovic

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Ion energy distributions measured inside a high-voltage cathode in a BF3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations von Godet, Ludovic, Radovanov, Svetlana, Sheuer, Jay, Cardinaud, Christophe, Fernandez, Nicolas, Ferro, Yves, Cartry, Gilles

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Ion energy distributions measured inside a high-voltage cathode in a BF 3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations von Godet, Ludovic, Radovanov, Svetlana, Sheuer, Jay, Cardinaud, Christophe, Fernandez, Nicolas, Ferro, Yves, Cartry, Gilles

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Alignment mark for front to back side alignment and lithography for optical device fabrication von Xu, Yongan, Godet, Ludovic

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Maskless lithography method to fabricate topographic substrate von Xu, Yongan, Godet, Ludovic

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NANO IMPRINT STAMPS von MCMACKIN, Ian, GODET, Ludovic

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NANO IMPRINT STAMPS von MCMACKIN, Ian, Matthew, GODET, Ludovic

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Optical resolution measurement method for optical devices von Sun, Yangyang, Fu, Jinxin, Godet, Ludovic

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Method for manufacturing optical device structures von Labonte, Andre P, Colak, Levent, Godet, Ludovic

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PATTERNED CHUCK FOR DOUBLE-SIDED PROCESSING von THIJSSEN, Rutger, GODET, Ludovic

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METHOD FOR MANUFACTURING OPTICAL DEVICE STRUCTURES von COLAK, Levent, GODET, Ludovic, LABONTE, Andre P

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METHOD FOR MANUFACTURING OPTICAL DEVICE STRUCTURES von COLAK, Levent, GODET, Ludovic, LABONTE, Andre P

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METHOD FOR COATING AN OPTICALLY REFLECTIVE LAYER ON A WAVEGUIDE AND SCREEN PRINTING DEVICE von GALIAZZO, Marco, GODET, Ludovic, FRANDOLI, Gaia

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