Indirect endpoint detection by chemical reaction and chemiluminescence von WEI CONG, GILHOOLY JAMES ALBERT, LI LEPING, SUROVIC WILLIAM JOSEPH, MORGAN, III CLIFFORD OWEN

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Indirect endpoint detection by chemical reaction and chemiluminescence von Li, Leping, Gilhooly, James Albert, Morgan, III, Clifford Owen, Surovic, William Joseph, Wei, Cong

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Endpoint detection by chemical reaction von Li, Leping, Gilhooly, James Albert, Morgan, III, Clifford Owen, Wei, Cong, Yu, Chienfan

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Real-time control of chemical-mechanical polishing processing by monitoring ionization current von WEI CONG, GILHOOLY JAMES ALBERT, LI LEPING, MORGAN CLIFFORD OWEN

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Endpoint detection by chemical reaction von YU, CHIENFAN, LI, LEPING, WEI, CONG, GILHOOLY, JAMES ALBERT, MORGAN, CLIFFORD OWEN III

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Endpoint detection by chemical reaction and reagent von WEI CONG, GILHOOLY JAMES ALBERT, LI LEPING, MORGAN, III CLIFFORD OWEN

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Endpoint detection by chemical reaction and light scattering von WEI CONG, GILHOOLY JAMES ALBERT, LI LEPING, MORGAN, III CLIFFORD OWEN

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Improved chemical mechanical polishing endpoint process control von MORGAN III, CLIFFORD OWEN, LI, LEPING, WEI, CONG, GILHOOLY, JAMES ALBERT

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Indirect endpoint detection by chemical reaction and chemiluminescence von GILHOOLY, JAMES ALBERT, WEI, CONG, MORGAN, III, CLIFFORD OWEN, SUROVIC, WILLIAM JOSEPH, LI, LEPING

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METHOD AND APPARATUS FOR DETECTING ENDPOINT OF LAYER REMOVAL PROCESS von MORGAN, CLIFFORD OWEN, LI, LEPING, WEI, CONG, GILHOOLY, JAMES ALBERT

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Endpoint detection by chemical reaction von WEI CONG, GILHOOLY JAMES ALBERT, YU CHIENFAN, LI LEPING, MORGAN, III CLIFFORD OWEN

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INDIRECT ENDPOINT DETECTION BY CHEMICAL REACTION AND CHEMILUMINESCENCE von MORGAN, CLIFFORD, OWEN, III, SUROVIC, WILLIAM, JOSEPH, LI, LEPING, GILHOOLY, JAMES, ALBERT, WEI, CONG

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Endpoint detection by chemical reaction and photoionization von WEI CONG, GILHOOLY JAMES ALBERT, YU CHIENFAN, LI LEPING, MORGAN, III CLIFFORD OWEN

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Endpoint detection by chemical reaction von WEI CONG, GILHOOLY JAMES ALBERT, YU CHIENFAN, LI LEPING, MORGAN, III CLIFFORD OWEN

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Indirect endpoint detection by chemical reaction von GILHOOLY, JAMES ALBERT, WEI, CONG, MORGAN, III, CLIFFORD OWEN, YU, CHIENFAN, LI, LEPING

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Process for removing residue from a semiconductor wafer after chemical-mechanical polishing von GILHOOLY, JAMES ALBERT, RUTTEN, MATTHEW JEREMY, NADEAU, DOUGLAS PAUL, HUYNH, CUC KIM, COHEN, SUSAN L, JURJEVIC, ROBERT ALBIN

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APPARATUS AND METHOD FOR DETECTING A SUBSTANCE von WEI CONG, GILHOOLY JAMES ALBERT, YU CHIENFAN, LI LEPING, MORGAN III. CLIFFORD OWEN, WILLIAM JOSEPH SALOWITZ

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METHOD AND APPARATUS FOR REDUCING AN AMOUNT OF A GASEOUS PRODUCT von WEI CONG, GILHOOLY JAMES ALBERT, YU CHIENFAN, LI LEPING, MORGAN III. CLIFFORD OWEN, WILLIAM JOSEPH SALOWITZ

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Cancelled operations: a 7-day cohort study of planned adult inpatient surgery in 245 UK National Health Service hospitals von Shrestha, Suman, Barnes, Dennis, Spargo, James, Hairsine, Brigid, Horner, Lisa, Jackson, Richard, Snell, Josie, Tritean, Maria, Peers, Beth, Forsyth-Jones, Tim, Knowlden, Peter, Dhar, King, Towers, Tammy, Mukherjee, Ronan, Osborne, Fiona, Westwood, John, Loftus, Alison, Cousins, Simon, Lewith, Henry, Pearce, Lauren, Fourie, Petrus, Durie, Carys, Moore, Alex, Svensson, Marie-Louise, Gibson, Kim, Kent, Melanie, Temple, Julie, Udall, William, Hale, Suzi, Rogerson, David, Darbyshire, Rebecca, Sohal, Aariana, Dobson, Richard, King, Kathryn, Daniels, Alex, Bhattacharyya, Sanjoy, May-Ling Cheung, Jenny, Ekwere, Ndi, Sampson, Julia, Francis, John, Schmidt, Ilona, Boynton, Claire, Clayton, Matt, Upadhyaya, Kavita, Jain, Arihant, Hopkins, Philip, Laha, Shondipon, Doyle, Donna, Loh, LI Lian, Wilby, Elizabeth, Van Ross, Jennifer, Siew, Sarah, Hinch, Nurse Rebecca, Moran, Nurse Louise, Walia, Nurse Sonia, Kotur, Karuna, McAtear, Megan, Marc Hastie, P.A.-A., Appleton, Richard, Williams, Robin, Campbell, Rachel, Shankey-Smith, Will, Critchley, Julia, Kelly, Keith, McLenachan, John, Jain, Surabhi, Reavley, Caroline, Ali, Inthekab Mohammed, Rousseau, Guy, Saxena, Sandeep, Verma, Priya, Rasoli, Sonia, Kingan, Ryan, Fleming, Naomi, Farrell, Nadine, Berry, Julian, Joshi, Kunal, Smith, Megan, Williams, Colin, Simpson, Emma, Roderick, Ellie, Mubarak, Mona, Rambhatla, Swetha, Sheikh, Faisal, Goel, Vandana, Bose, Gahan, Coathup, Rachel, Marsden, Mia, Singh, Permendra, Vallabhaneni, Murali, Cassells, Naomi, Hadfield, John, Kinsella, Mike (Stephen), Syme, Phoebe, Whaley, Anne, Auldin, Mohammad, Evans, Gail, Davis, Caroline, Birch, Janine, Temlett, Emma

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