Fabrication of ultra high aspect ratio Bragg gratings for optical filter von Sardo, Stefano, Giacometti, Fabrizio, Doneda, Sergio, Colombo, Umberto, Crippa, Davide, Muri, Melissa Di, Fiorino, Antonio, Garnier, Audrey, Morson, Romano, Nottola, Alessandro, Zuliani, Giorgio, Gentili, Massimo, Romagnoli, Marco

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Preface von Gentili, Massimo, De Vittorio, Massimo

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Editorial on the 30th anniversary of Microelectronic Engineering von Kern, Dieter, Pérez-Murano, Francesc, Choi, Jin-Woo, Vieu, Christophe, Gentili, Massimo, Takai, Mikio, Peckerar, Martin, Gogolides, Evangelos

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Electron-Beam Study of Nanometer Performances of the SAL 601 Chemically Amplified Resist von Gentili, Massimo, Gerardino, Annamaria, Di Fabrizio, Enzo

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Fabrication of Optical Wave-Guides in Silica-on-Silicon by Nickel Electroplating and Conventional Reactive Ion Etching von Massimi, Anna, Fabrizio, Enzo Di, Gentili, Massimo, Piccinin, Davide, Martinelli, Mario

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Electron Beam Lithography Simulation on Homogeneous and Multilayer Substrates von Raptis, Ioannis, Nowotny, Bernhard, Glezos, Nikos, Gentili, Massimo, Meneghini, Giancarlo

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Microphotonic devices fabricated by Silicon micromachining techniques von DI FABRIZIO, E, BACIOCCHI, M, GENTILI, M, GRELLA, L, MASTROGIACOMO, L

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Fabrication of 5 nm resolution electrodes for molecular devices by means of electron beam lithography von DI FABRIZIO, E, GRELLA, L, GENTILI, M, BACIOCCHI, M, MASTROGIACOMO, L, MORALES, P

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Line edge roughness (LER) reduction strategy for SOI waveguides fabrication von Sardo, Stefano, Giacometti, Fabrizio, Doneda, Sergio, Colombo, Umberto, Muri, Melissa Di, Donghi, Anna, Morson, Romano, Mutinati, Giorgio, Nottola, Alessandro, Gentili, Massimo, Ubaldi, Maria Chiara

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Fabrication of high-resolution Fresnel zone plates by a single layer resist process von HIROSHIMA, H, KOMURO, M, GENTILI, M, GRELLA, L, DI FABRIZIO, E, MAGGIORA, R

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Preface von Gentili, Massimo

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MNE 2010: Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE) von DE VITTORIO, Massimo, GENTILI, Massimo, GERARDINO, Annamaria, LORENZELLI, Leandro, MARTIRADONNA, Luigi, PINGUE, Pasqualantonio

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The effects of X-ray irradiation-induced damage on reliability in MOS structures von Kim, Shi-ho, Lee, Ho-jun, Han, Chul-hi, Lee, Kwyro, Choi, Sang-soo, Jeon, Young-jin, Di Fabrizio, Enzo, Gentili, Massimo

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Fast proximity corrections for electron-beam-fabricated high resolution and high-aspect-ratio Fresnel zone plate von DI FABRIZIO, E, GRELLA, L, BACIOCCHI, M, GENTILI, M, PESCHIAROLI, D, MASTROGIACOMO, L, MAGGIORA, R

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Source-drain metal contact effects in short-channel a-Si:H thin-film transistors von FORTUNATO, G, GENTILI, M, LUCIANI, L, MARIUCCI, L, PECORA, A, PETROCCO, G

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Nanofabrication of Fresnel zone plates for X-ray focusing von BACIOCCHI, M, DI FABRIZIO, E, GENTILI, M, GRELLA, L, MAGGIORA, R, MASTROGIACOMO, L, PESCHIAROLI, D

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X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances von Di Fabrizio, Enzo, Gentili, Massimo

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Fabric shield for double-glazing units and the like von NICOLOSI, GIOVANNI, GENTILI, MASSIMO

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CLAUDIO SARTORI: BIBLIOGRAPHY OF A BIBLIOGRAPHER von Carrer, Pinuccia, Gentili-Tedeschi, Massimo

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Fabric shield for double-glazing units and the like von NICOLOSI, GIOVANNI, GENTILI, MASSIMO

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