Direct pattern transfer for sub-45 nm features using nanoimprint lithography von Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Nordquist, Kevin J., Ainley, Eric, Mangat, Pawitter

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Selective dry etch process for step and flash imprint lithography von Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Resnick, Douglas J., Hooper, A.E., Johnson, Steve, Willson, Grant

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Direct pattern transfer for sub-45nm features using nanoimprint lithography von Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Nordquist, Kevin J., Ainley, Eric, Mangat, Pawitter

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Direct imprinting of etch barriers using step and flash imprint lithography von Gehoski, Kathy A, Dauksher, William J, Le, Ngoc V, Resnick, Douglas J

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Direct imprinting of etch barriers using step and flash imprint lithography von DAUKSHER WILLIAM J, RESNICK DOUGLAS J, GEHOSKI KATHY A, LE NGOC V

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DIRECT IMPRINTING OF ETCH BARRIERS USING STEP AND FLASH IMPRINT LITHOGRAPHY von LE, NGOC, V, DAUKSHER, WILLIAM, J, GEHOSKI, KATHY, A, RESNICK, DOUGLAS, J

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DIRECT IMPRINTING OF ETCH BARRIERS USING STEP AND FLASH IMPRINT LITHOGRAPHY von LE, NGOC, V, DAUKSHER, WILLIAM, J, GEHOSKI, KATHY, A, RESNICK, DOUGLAS, J

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Direct imprinting of etch barriers using step and flash imprint lithography von DAUKSHER WILLIAM J, RESNICK DOUGLAS J, GEHOSKI KATHY A, LE NGOC V

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Distortion and overlay performance of UV step and repeat imprint lithography von Choi, Jin, Nordquist, Kevin, Cherala, Ashuman, Casoose, Lester, Gehoski, Kathy, Dauksher, William J., Sreenivasan, S.V., Resnick, Douglas J.

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Three Dimensional Micro Fuel Cells for Portable Applications von Koripella, Ramesh, Krishnan, Ramkumar, Fisher, Allison, Eisenbeiser, Kurt, Dauksher, William, Young, Steve, Gehoski, Kathy, D'Urso, John, Hallmark, Jerry, Jaskie, James

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