Electrochemical atomic layer deposition of copper nanofilms on ruthenium von Gebregziabiher, Daniel K., Kim, Youn-Geun, Thambidurai, Chandru, Ivanova, Valentina, Haumesser, Paul-Henri, Stickney, John L.

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Formation of Palladium Nanofilms Using Electrochemical Atomic Layer Deposition (E-ALD) with Chloride Complexation von Sheridan, Leah B, Gebregziabiher, Daniel K, Stickney, John L, Robinson, David B

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E-ALD of Cu Nanofilms on Ru/Ta Wafers Using Surface Limited Redox Replacement von Thambidurai, Chandru, Gebregziabiher, Daniel K., Liang, Xuehai, Zhang, Qinghui, Ivanova, Valentina, Haumesser, Paul-Henri, Stickney, John L.

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Cu(111) Surface Passivation with Atomic Layers of Te, Se or I, Studied Using Auger Spectrscopy von Gebregziabiher, Daniel K., Ledina, Maria A., Preisser, Robert, Stickney, John L.

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Electrochemical Atomic Layer Deposition (E-ALD) of Palladium Nanofilms by Surface Limited Redox Replacement (SLRR), with EDTA Complexation von Sheridan, Leah B., Czerwiniski, Justin, Jayaraju, Nagarajan, Gebregziabiher, Daniel K., Stickney, John L., Robinson, David B., Soriaga, Manuel P.

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Electrochemical Ultra High Vacuum Studies of Germanium Under Potential Deposition on Gold von Gebregziabiher, Daniel K.

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Electrochemical deposition processes for semiconductor wafers von SHARBONO CHARLES, ERICKSON DAVID J, THAMBIDURAI CHANDRU, GEBREGZIABIHER DANIEL K, KLOCKE JOHN

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ELECTROCHEMICAL DEPOSITION PROCESSES FOR SEMICONDUCTOR WAFERS von THAMBIDURAI, CHANDRU, GEBREGZIABIHER, DANIEL, K, KLOCKE, JOHN, ERICKSON, DAVID, J, SHARBONO, CHARLES

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ELECTROCHEMICAL DEPOSITION PROCESSES FOR SEMICONDUCTOR WAFERS von THAMBIDURAI, CHANDRU, GEBREGZIABIHER, DANIEL, K, KLOCKE, JOHN, ERICKSON, DAVID, J, SHARBONO, CHARLES

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ELECTROCHEMICAL DEPOSITION PROCESSES FOR SEMICONDUCTOR WAFERS von SHARBONO CHARLES, ERICKSON DAVID J, THAMBIDURAI CHANDRU, GEBREGZIABIHER DANIEL K, KLOCKE JOHN

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Elektrochemische Abscheidungsprozesse für Halbleiterwafer von ERICKSON, DAVID J, GEBREGZIABIHER, DANIEL K, THAMBIDURAI, CHANDRU, KLOCKE, JOHN, SHARBONO, CHARLES

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ELECTROCHEMICAL DEPOSITION PROCESSES FOR SEMICONDUCTOR WAFERS von SHARBONO CHARLES, ERICKSON DAVID J, THAMBIDURAI CHANDRU, GEBREGZIABIHER DANIEL K, KLOCKE JOHN

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Electrochemical deposition processes for semiconductor wafers von ERICKSON, DAVID J, GEBREGZIABIHER, DANIEL K, THAMBIDURAI, CHANDRU, KLOCKE, JOHN, SHARBONO, CHARLES

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