Sound pressure and vibration velocity FFT sensor based on integration of N harmonic response MEMS sensing units and working method thereof von GE XUANZUO, ZHANG QIANG, PARK SEUNGUN, CHEN LIJIE

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Resonant high-sensitivity sound pressure detection hydrophone and implementation method thereof von LEI YAHUI, GE XUANZUO, ZHANG QIANG, PARK SEUNGUN, CHEN LIJIE

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Resonance high-sensitivity detection acoustic vector hydrophone realized by utilizing resonance characteristic of second-order inertial system, and design method and working method... von LEI YAHUI, GE XUANZUO, ZHANG QIANG, PARK SEUNGUN, CHEN LIJIE

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Resonance response MEMS integrated sound pressure/vibration velocity sensitive chip with N frequency comb teeth von LEI YAHUI, QU YANDA, GONG LIJIA, GE XUANZUO, ZHANG QIANG, PARK SEUNGUN, CHEN LIJIE

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Flexible substrate PVDF piezoelectric co-vibration type vector hydrophone and assembling method thereof von FANG HAO, ZHANG MINGHUI, ZHANG HAIGANG, ZHANG QIANG, GE XUANZUO, PARK SEUNGUN, DAI XING, WANG HAILI, CHEN LIJIE

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Vector acceleration sensor base design method based on film vibration theory von FANG HAO, ZHANG MINGHUI, ZHANG HAIGANG, ZHANG QIANG, GE XUANZUO, PARK SEUNGUN, DAI XING, WANG HAILI, CHEN LIJIE

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Overload or interference signal release and discrete capacitance sensitization design method of hydrophone discrete beam membrane fusion sound sensitive chip von LEI YAHUI, QU YANDA, GONG LIJIA, ZHANG QIANG, GE XUANZUO, PARK SEUNGUN, CHEN LIJIE

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