Effect of Dissolved Oxygen on Cu Corrosion in Single Wafer Cleaning Process von Imai, Masayoshi, Yamashita, Yukinari, Futatsuki, Takashi, Shiohara, Morio, Kondo, Seiichi, Saito, Shuichi

Volltext

Low-Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor at High Pressure von Futatsuki, Takashi, Oe, Taro, Aoki, Hidemitsu, Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Volltext

Very Smooth SiO2/SiC Interface Formed by Supercritical Water Oxidation at Low Temperature von Futatsuki, Takashi, Oe, Taro, Aoki, Hidemitsu, Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Volltext

Behavior of ultrafine metallic particles on silicon wafer surface von MORINAGA, H, FUTATSUKI, T, OHMI, T, FUCHITA, E, ODA, M, HAYASHI, C

Volltext

Critical Cleaning by Functional Water in the Semiconductor/FPD Manufacturing Process von FUTATSUKI, Takashi

Volltext

Low-temperature oxidation of SiC surfaces by supercritical water oxidation von Futatsuki, Takashi, Oe, Taro, Aoki, Hidemitsu, Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Volltext

Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing von Yamanaka, Koji, Imaoka, Takashi, Futatsuki, Takashi, Yamashita, Yukimari, Mitsumori, Ken-ichi, Kasama, Yasuhiko, Aoki, Hidemitsu, Yamasaki, Shinya, Aoto, Nahomi

Volltext

SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE von YANAGISAWA, Yuki, FUTATSUKI, Takashi

Volltext bestellen

Very Smooth SiO 2 /SiC Interface Formed by Supercritical Water Oxidation at Low Temperature von Futatsuki, Takashi, Oe, Taro, Aoki, Hidemitsu, Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Volltext

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE von FUTATSUKI, TAKASHI, KAMIIRISA, TAKASHI, NAGAI, KENJI

Volltext bestellen

PFC recycling system by continuous gas chromatography von Tajima, Y., Futatsuki, T., Abe, T., Tanzawa, S.

Volltext

HALBLEITERVORRICHTUNG UND PRODUKTIONSVERFAHREN FÜR EINE HALBLEITERVORRICHTUNG von Yanagisawa, Yuki, Futatsuki, Takashi

Volltext bestellen

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME von YANAGISAWA YUKI, FUTATSUKI TAKASHI

Volltext bestellen

SEMICONDUCTOR DEVICE AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE von YANAGISAWA, Yuki, FUTATSUKI, Takashi

Volltext bestellen

HALBLEITERVORRICHTUNG UND VERFAHREN ZUM HERSTELLEN EINERHALBLEITERVORRICHTUNG von Futatsuki, Takashi, Nagai, Kenji, Kamiirisa, Takashi

Volltext bestellen

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURE OF SEMICONDUCTOR DEVICE von KAMIIRISA TAKASHI, FUTATSUKI TAKASHI, NAGAI KENJI

Volltext bestellen

Semiconductor device and method for manufacture of semiconductor device von FUTATSUKI, TAKASHI, KAMIIRISA, TAKASHI, NAGAI, KENJI

Volltext bestellen

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURE OF SEMICONDUCTOR DEVICE von KAMIIRISA, Takashi, FUTATSUKI, Takashi, NAGAI, Kenji

Volltext bestellen

Gas separation device and gas separation method von FUTATSUKI, TAKASHI, ONO, YOSHINORI, NAKAMURA, YUKI

Volltext bestellen

Preliminary Experiments on the Separation of Perfluorocompounds by Continuous Circulation Gas Chromatography von TANZAWA, Sadamitsu, HIROKI, Seiji, ABE, Tetsuya, FUTATSUKI, Takashi, TAJIMA, Yoshinori

Volltext