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  1. 1
    Boron Diffusion Behavior During the Formation of Shallow p+/n Junction Using the Combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non-Melt Excimer Laser(NLA) Processes

    Boron Diffusion Behavior During the Formation of Shallow p+/n Junction Using the Combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non-Melt Exc... von Binti Aid, Siti Rahmah, Matsumoto, Satoru, Suzuki, Toshiharu, Fuse, Gensyu, Nakazawa, Toshihiro


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  2. 2
    Formation of ultrashallow junctions less than 10nm with the combination of low energy B ion implantation and laser annealing

    Formation of ultrashallow junctions less than 10nm with the combination of low energy B ion implantation and laser annealing von Yamada, Ryuta, Seto, Singo, Sato, Sosi, Tanaka, Yuki, Matumoto, Satoru, Suzuki, Toshiharu, Fuse, Gensyu, Kudo, Tosio, Sakuragi, Susumu


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  3. 3
    Boron Diffusion Behavior during the Formation of Shallow p+/n Junction using the combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non Melt Excimer Laser(NLA) Processes

    Boron Diffusion Behavior during the Formation of Shallow p+/n Junction using the combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non Melt Exc... von Binti Aid, Siti Rahmah, Matsumoto, Satoru, Suzuki, Toshiharu, Fuse, Gensyu, Nakazawa, Toshihiro


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  4. 4
    Effect of Low Temperature Annealing Prior to Non-melt Laser Annealing in Ultra-shallow Junction Formation

    Effect of Low Temperature Annealing Prior to Non-melt Laser Annealing in Ultra-shallow Junction Formation von Fukaya, T., Yamada, R., Tanaka, Y., Matsumoto, S., Suzuki, T.


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