Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties von Reiter, Sebastian, Han, Weijia, Mai, Christian, Spirito, Davide, Jose, Josmy, Zöllner, Marvin, Fursenko, Oksana, Schubert, Markus Andreas, Stemmler, Ivo, Wenger, Christian, Fischer, Inga Anita

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Etch mechanism of an Al2O3 hard mask in the Bosch process von Drost, Martin, Marschmeyer, Steffen, Fraschke, Mirko, Fursenko, Oksana, Bärwolf, Florian, Costina, Ioan, Mahadevaiah, Mamathamba Kalishettyhalli, Lisker, Marco

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Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process von Bauer, Joachim, Fursenko, Oksana, Marschmeyer, Steffen, Heinrich, Friedhelm, Villasmunta, Francesco, Villringer, Claus, Zesch, Christoph, Schrader, Sigurd

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Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry von Fursenko, Oksana, Lukosius, Mindaugas, Bauer, Joachim, Villringer, Claus, Lux, Helge, Bärwolf, Florian, Lisker, Marco, Mai, Andreas

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(Invited) Advancing Si Spin Qubit Research: Process Integration of Hall Bar FETs on Si/SiGe in a 200mm BiCMOS Pilot Line von Reichmann, Felix, Mistroni, Alberto, Yamamoto, Yuji, Kulse, Philipp, Marschmeyer, Steffen, Wolansky, Dirk, Fursenko, Oksana, Zöllner, Marvin Hartwig, Capellini, Giovanni, Diebel, Laura, Bougeard, Dominique, Lisker, Marco

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Determination of optical constants and scattering properties of transparent polymers for use in optoelectronics von Bauer, Joachim, Fursenko, Oksana, Heinrich, Friedhelm, Gutke, Marko, Kornejew, Eckhart, Broedel, Oliver, Dietzel, Birgit, Kaltenbach, Alexander, Burkhardt, Martin, Edling, Matthias, Steglich, Patrick, Herzog, Michael, Schrader, Sigurd

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SiGe p-n-p HBTs With 265-GHz fmax, 175-GHz fT, and 3.65-ps Gate Delay von HEINEMANN, Bernd, RÜCKER, Holger, TRUSCH, Andreas, WOLANSKY, Dirk, YAMAMOTO, Yuji, BARTH, Rainer, DREWS, Jürgen, FURSENKO, Oksana, GRABOLLA, Thomas, KURPS, Rainer, MARSCHMEYER, Steffen, SCHEIT, Alexander, SCHMIDT, Detlef

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(Invited) Epitaxial Growth of Low Defect SiGe Buffer Layers for Integration of New Materials on 300 mm Silicon Wafers von Kozlowski, Gregorz, Fursenko, Oksana, Zaumseil, Peter, Schroeder, Thomas, Vorderwestner, Martin, Storck, Peter

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SiGe p-n-p HBTs With 265-GHz f max, 175-GHz f T, and 3.65-ps Gate Delay von Heinemann, Bernd, Rucker, Holger, Barth, Rainer, Drews, Jurgen, Fursenko, Oksana, Grabolla, Thomas, Kurps, Rainer, Marschmeyer, Steffen, Scheit, Alexander, Schmidt, Detlef, Trusch, Andreas, Wolansky, Dirk, Yamamoto, Yuji

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(Invited) Graphene Synthesis and Processing on Ge Substrates von Lukosius, Mindaugas, Lippert, Gunther, Dabrowski, J, Kitzmann, Julia, Lisker, Marco, Kulse, P, Krüger, Andreas, Fursenko, Oksana, Costina, Ioan, Trusch, Andreas, Yamamoto, Yuji, Wolff, Andre, Mai, Andreas, Schroeder, Thomas, Lupina, Grzegorz

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Chemical vapor phase etching of polycrystalline selective to epitaxial Si and SiGe von Yamamoto, Yuji, Tillack, Bernd, Köpke, Klaus, Fursenko, Oksana

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Selective Polycrystalline Si and SiGe Deposition on Epitaxial Si Induced by B-Atomic Layer Doping von Yamamoto, Yuji, Koepke, Klaus, Fursenko, Oksana, Weidner, Guenter, Murota, Junichi, Tillack, B.

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(Invited) Graphene Synthesis and Processing on Ge Substrates von Lukosius, Mindaugas, Lippert, Gunther, Dabrowski, J, Kitzmann, Julia, Lisker, Marco, Kulse, P, Krüger, Andreas, Fursenko, Oksana, Costina, Ioan, Trusch, Andreas, Yamamoto, Yuji, Wolff, Andre, Mai, Andreas, Schroeder, Thomas, Lupina, Grzegorz

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Selective Polycrystalline Si Deposition on Epitaxial Si induced by B-Atomic Layer Doping von Yamamoto, Yuji, Koepke, Klaus, Fursenko, Oksana, Weidner, Guenter, Murota, Junichi, Tillack, B.

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The N-terminal dimerization domains of human and Drosophila CTCF have similar functionality von Kamalyan, Sofia, Kyrchanova, Olga, Klimenko, Natalia, Babosha, Valentin, Vasileva, Yulia, Belova, Elena, Fursenko, Dariya, Maksimenko, Oksana, Georgiev, Pavel

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CTCF As an Example of DNA-Binding Transcription Factors Containing Clusters of C2H2-Type Zinc Fingers von Maksimenko, O G, Fursenko, D V, Belova, E V, Georgiev, P G

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MILKING MACHINE von KOKAREV PAVEL JUR'EVICH, UZHIK VLADIMIR FEDOROVICH, FURSENKO ALEKSANDR ALEKSANDROVICH, KLESOV DMITRIJ NIKOLAEVICH, UZHIK OKSANA VLADIMIROVNA

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