Effect of Polymer Protection and Film Thickness on Acid Generator Distribution in Chemically Amplified Resists von Fukuyam, Takehiro, Kozawa, Takahiro, Yamamoto, Hiroki, Tagawa, Seiichi, Irie, Makiko, Mimura, Takeyoshi, Iwai, Takeshi, Onodera, Junichi, Hirosawa, Ichiro, Koganesawa, Tomoyuki, Horie, Kazuyuki

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