Etching Mechanisms of SiO2 and SiNx:H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes von Guillemin, S., Mumbauer, P., Radtke, H., Fimberger, M., Fink, S., Kraxner, J., Faes, A., Siegert, J.

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Etching Mechanisms of SiO 2 and SiN x :H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes von Guillemin, S., Mumbauer, P., Radtke, H., Fimberger, M., Fink, S., Kraxner, J., Faes, A., Siegert, J.

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Upgrading of heat carrier oil derived from liquid-phase pyrolysis via fluid catalytic cracking von Berchtold, M., Fimberger, J., Reichhold, A., Pucher, P.

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DEVICE FOR CONTROLLING, REGULATING AND MONITORING HEATING SYSTEMS von NIMMERVOLL, RAIMUND, LEHNER, ANDREAS, ATZGERSTORFER, KURT, SIMMET, MANFRED, GROEMER, HERBERT, FIMBERGER, JOHANNA

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