Design of a MEMS-Based Oscillator Using 180nm CMOS Technology von Roy, Sukanta, Ramiah, Harikrishnan, Reza, Ahmed Wasif, Lim, Chee Cheow, Ferrer, Eloi Marigo

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Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes von Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Suresh, Kasyap

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A 230 MHz CMOS-MEMS bulk acoustic wave resonator von MARIGO FERRER, Eloi, MUNOZ-GAMARRA, J. L, GINER, J, URANGA, A, BARNIOL, N

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A 230MHz CMOS-MEMS bulk acoustic wave resonator von Ferrer, Eloi Marigó, Muñoz-Gamarra, J.L., Giner, J., Uranga, A., Barniol, N.

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Monolithic packaging and transduction approaches for CMOS-MEMS resonators von Marigó Ferrer, Eloi

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Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry von Vidal Álvarez, Gabriel, Marigó Ferrer, Eloi, Torres Canals, Francisco, Barniol i Beumala, Núria

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Squared PMUT with enhanced pressure sensitivities von Ledesma, Eyglis, Zamora, Iván, Torres, Francesc, Uranga del Monte, Aránzazu, Tzanov, Vassil, Barniol i Beumala, Núria, Marigó Ferrer, Eloi, Soundara-Pandian, Mohan

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Squared PMUT with enhanced pressure sensitivities von Ledesma, Eyglis, Zamora, Iván, Torres, Francesc, Uranga del Monte, Aránzazu, Tzanov, Vassil, Barniol i Beumala, Núria, Marigó Ferrer, Eloi, Soundara-Pandian, Mohan

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Squared PMUT with enhanced pressure sensitivities von Ledesma, Eyglis, Zamora, Iván, Torres, Francesc, Uranga del Monte, Aránzazu, Tzanov, Vassil, Barniol i Beumala, Núria, Marigó Ferrer, Eloi, Soundara-Pandian, Mohan

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Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry von Vidal Álvarez, Gabriel, Marigó Ferrer, Eloi, Torres, Francesc, Barniol i Beumala, Núria

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Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry von Vidal Álvarez, Gabriel, Marigó Ferrer, Eloi, Torres, Francesc, Barniol i Beumala, Núria

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Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction von Marigó Ferrer, Eloi, Sansa Perna, Marc, Pérez Murano, Francesc, Uranga del Monte, Aránzazu, Barniol i Beumala, Núria

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Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction von Marigó Ferrer, Eloi, Sansa Perna, Marc, Pérez Murano, Francesc, Uranga del Monte, Aránzazu, Barniol i Beumala, Núria

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Monolithic packaging and transduction approaches for CMOS-MEMS resonators von Marigó Ferrer, Eloi, Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica

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