Causes and prevention of temperature-dependent bubbles in silicon wafer bonding von MITANI, K, LEHMANN, V, STENGL, R, FEIJOO, D, GOSELE, U. M, MASSOUD, H. Z

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A new evaluation method of silicon wafer bonding interfaces and bonding strength by KOH etching von MITANI, K, FEIJOO, D, CHA, G, GÖSELE, U. M

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Silicon wafer bonding studied by infrared absorption spectroscopy von Feijoó, Diego, Chabal, Y. J., Christman, S. B.

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Method for reducing and homogenising the thickness of a semiconductor layer on the surface of an electrically insulating material von FEIJOO, DIEGO, WAHLICH, REINHOLD, RIEMENSCHNEIDER, OLIVER

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Process for cleaning, drying and hydrophilizing a semiconductor wafer von SCHWAB GUENTER, BUSCHHARDT THOMAS, ZAPILKO CLEMENS, FEIJOO DIEGO

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Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material von RIEMENSCHNEIDER OLIVER, WAHLICH REINHOLD, FEIJOO DIEGO

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Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material von Feijoo, Diego, Riemenschneider, Oliver, Wahlich, Reinhold

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Recrystallization of silicon amorphized by carbon implantation von CHEVACHAROENKUL, S, IIZHOEFER, J. R, FEIJOO, D, GOÊSELE, U

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Virtual Festo MPS® PA Workstation for Level and Temperature Process Control von Chanchay, Darío J., Feijoo, Juan Diego, Llanos, Jacqueline, Ortiz-Villalba, Diego

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Method and apparatus for the treatment of a semiconductor wafer von WAHLICH REINHOLD, MURPHY BRIAN, FEIJOO DIEGO

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Method for manufacturing a layered structure von FEIJOO, DIEGO, SCHWAB, GUENTER, BUSCHHARDT, THOMAS

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Semiconductor wafer i.e. silicon wafer, treating method for producing microelectronic component, involves transporting semiconductor wafer away from output opening of liquid contai... von FEIJOO, DIEGO, SCHWAB, GUENTER, BUSCHHARDT, THOMAS

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Method for producing a layer structure von SCHWAB GUENTER, BUSCHHARDT THOMAS, FEIJOO DIEGO

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Method for producing a layer structure von Feijoo, Diego, Schwab, Guenter, Buschhardt, Thomas

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Method for producing a semiconductor wafer von SCHWAB GUENTER, SCHWANDNER JUERGEN, BUSCHHARDT THOMAS, KERSTAN MICHAEL, PIETSCH GEORG, FEIJOO DIEGO

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METHOD AND APPARATUS FOR THE TREATMENT OF A SEMICONDUCTOR WAFER von WAHLICH REINHOLD, MURPHY BRIAN, FEIJOO DIEGO

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Verfahren zur Beschichtung von Oberflächen von Schindler, Wolfram, Feijóo, Diego

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Method for the treatment of a semiconductor wafer von SCHWAB GUENTER, SOLLINGER FRANZ, BUSCHHARDT THOMAS, LUTHE HANS-JOACHIM, FEIJOO DIEGO

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Process for cleaning a semiconductor wafer using a cleaning solution von SCHWAB GUENTER, BUSCHHARDT THOMAS, ZAPILKO CLEMENS, FEIJOO DIEGO

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Process for cleaning a semiconductor wafer using a cleaning solution von Zapilko, Clemens, Buschhardt, Thomas, Feijoo, Diego, Schwab, Guenter

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