Designing a robust high-speed CMOS-MEMS capacitive humidity sensor von Lazarus, N, Fedder, G K

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Gas chemical sensitivity of a CMOS MEMS cantilever functionalized via evaporation driven assembly von Dorsey, K L, Bedair, S S, Fedder, G K

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Estimation of line dimensions in 3D direct laser writing lithography von Guney, M G, Fedder, G K

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Integrated vertical parallel-plate capacitive humidity sensor von Lazarus, N, Fedder, G K

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On the origin of selectivity and anisotropy loss during microstructure release etch von Gilgunn, P J, Fedder, G K

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Endoscopic optical coherence tomography based on a microelectromechanical mirror von Pan, Y, Xie, H, Fedder, G K

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Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope von Huikai Xie, Fedder, G.K.

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Position control of parallel-plate microactuators for probe-based data storage von Lu, M.S.-C., Fedder, G.K.

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A two-axis electrothermal micromirror for endoscopic optical coherence tomography von Jain, A., Kopa, A., Yingtian Pan, Fedder, G.K., Huikai Xie

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A CMOS-MEMS mirror with curled-hinge comb drives von Huikai Xie, Yingtian Pan, Fedder, G.K.

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Post-CMOS processing for high-aspect-ratio integrated silicon microstructures von Huikai Xie, Erdmann, L., Xu Zhu, Gabriel, K.J., Fedder, G.K.

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A post-CMOS micromachined lateral accelerometer von Hao Luo, Gang Zhang, Carley, L.R., Fedder, G.K.

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Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons von Voiculescu, I., Zaghloul, M.E., McGill, R.A., Houser, E.J., Fedder, G.K.

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Micromachined high-Q inductors in a 0.18-μm copper interconnect low-k dielectric CMOS process von Lakdawala, H., Zhu, X., Luo, H., Santhanam, S., Carley, L.R., Fedder, G.K.

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Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror von Xie, Huikai, Pan, Yingtian, Fedder, Gary K.

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Integrated Microelectromechanical Gyroscopes von Xie, Huikai, Fedder , Gary K

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Technologies for Cofabricating MEMS and Electronics von Fedder, Gary K., Howe, Roger T., Liu, Tsu-Jae King, Quevy, Emmanuel P.

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Multimode digital control of a suspended polysilicon microstructure von Fedder, G.K., Howe, R.T.

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Emerging simulation approaches for micromachined devices von Mukherjee, T., Fedder, G.K., Ramaswamy, D., White, J.

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Endoscopic optical coherence tomography with new MEMS mirror von Xie, Tuqiang, Xie, Huikai, Fedder, G.K., Pan, Yingtian

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