Nonlinearity and hysteresis of resonant strain gauges von Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.

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Towards integrated microliquid handling systems von Elwenspoek, M, Lammerink, T S J, Miyake, R, Fluitman, J H J

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Sacrificial wafer bonding for planarization after very deep etching von Spiering, V.L., Berenschot, J.W., Elwenspoek, M., Fluitman, J.H.J.

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Micro resonant force gauges von Tilmans, Harrie A.C., Elwenspoek, Miko, Fluitman, Jan H.J.

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Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure von Gui, Chengqun, Legtenberg, R, Elwenspoek, M, Fluitman, J H

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An integrated optic adiabatic TE/TM mode splitter on silicon von de Ridder, R.M., Sander, A.F.M., Driessen, A., Fluitman, J.H.J.

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Selective Mode Excitation And Detection Of Micromachined Resonators von Prak, A., Elwenspoek, M., Fluitman, J.H.J.

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A hysteresis model for an orthogonal thin-film magnetometer von de Ridder, R.M., Fluitman, J.H.

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Applications of a model for silicon resonant sensors von Prak, Albert, Fluitman, Jan H.J.

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A fabrication process for electrostatic microactuators with integrated gear linkages von Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.H.

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Output Characteristics of a Thin-Film Piezoelectric AE Sensor for Magnetic Head-Disk Interaction von IMAI, Satomitsu, BURGER, G. J., LAMMERINK, T. S. J., FLUITMAN, J. H. J.

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(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators von Tilmans, H.A.C., Legtenberg, R., Schurer, H., Ijntema, D.J., Elwenspoek, M., Fluitman, J.H.J.

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Micro-liquid flow sensor von Lammerink, Theo S.J., Tas, Niels R., Elwenspoek, Miko, Fluitman, Jan H.J.

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Multi-parameter detection in fluid flows von van Kuijk, J., Lammerink, T.S.J., de Bree, H.-E., Elwenspoek, M., Fluitman, J.H.J.

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Possible explanations for the low temperature resistivities of Ni3Al and Ni3Ga alloys in terms of spin density fluctuation theories von Fluitman, J H J, Boom, R, Chatel, P F De, Schinkel, C J, Tilanus, J L L, Vries, B R De

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The influence of sample geometry on the magnetoresistance of Ni-Fe films von Fluitman, J.H.J.

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A thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction von Imai, S., Tokuyama, M., Hirose, S., Burger, G.J., Lammerink, T.S.J., Fluitman, J.H.J.

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A fabrication process for electrostatic micro actuators with integrated gear linkages von LEGTENBERG, R, BERENSCHOT, E, ELWENSPOEK, M, FLUITMAN, J. H

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Realization of mechanical decoupling zones for package-stress reduction von Spiering, V.L., Bouwstra, S., Fluitman, J.H.J.

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Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider von Imai, S., Burger, G.-J., Lammerink, T.S.J., Fluitman, J.H.J.

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