Reactivity of Hydroxyl Groups on the Surface of Solid Oxides in Atomic Layer Deposition Processes von Ezhovskii, Yu. K.

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Molecular Layering of an Additive Layer of Silicon Dioxide on Anodized Tantalum and Niobium Oxides von Ezhovskii, Yu. K., Mikhailovskii, S. V.

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Nanolayers of Tantalum- and Aluminum Oxides and Dielectric Compositions Based on Them von Ezhovskii, Yu. K.

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Surface Reactivity of Single-Crystal Silicon in Atomic Layer Deposition Processes von Ezhovskii, Yu. K.

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Molecular Layering of Silicon Nitride Nanolayers with the Use of Ammonia Plasma von Ezhovskii, Yu. K., Mikhailovskii, S. V.

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Molecular layering of silicon and aluminum oxides on binary semiconductors von Ezhovskii, Yu. K.

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Atomic Layer Deposition of Silicon Nitride Films on Gallium Arsenide Using a Glow Discharge von Ezhovskii, Yu. K., Mikhailovskii, S. V.

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Molecular Layer Deposition of Silicon Nitride with Glow Discharge Activation von Ezhovskii, Yu. K., Mikhailovskii, S. V.

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Characteristics of the interfaces and the properties of chromium oxide nanolayers on gallium arsenide von Ezhovskiĭ, Yu. K., Egorov, A. L.

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Formation of Dielectric Nanolayers of Aluminum and Silicon Oxides on AIIIBV Semiconductors von Ezhovskii, Yu. K.

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Atomic-layer deposition of cadmium chalcogenides on silicon von Ezhovskii, Yu. K.

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Surface modification of silicate matrices with chromium oxides von Ezhovskii, Yu. K.

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Reactivity of solid surfaces in the chemical nanotechnology of low-dimensional systems von Ezhovskii, Yu. K.

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Atomic layer deposition of zinc sulfide nanolayers on monocrystalline silicon substrates von Ezhovskii, Yu. K., Zakharova, N. V.

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Atomic layer deposition of surface nanostructures of cadmium and zinc chalcogenides von Ezhovskii, Yu. K.

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Formation and certain properties of zinc chalcogenide nanolayers on semiconductor matrices von Ezhovskii, Yu. K., Zakharova, N. V.

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Preparation of nanostructured silicon oxide and silicon nitride films using nanotechnologies von Ezhovskii, Yu. K.

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Formation and dielectric properties of nanolayers of tantalum and aluminum oxides von Ezhovskii, Yu. K.

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Atomic layer deposition of chromium oxide nanolayers von Ezhovskii, Yu. K., Kirillova, M. A.

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Atomic layer deposition of multilayer ZnTe/CdTe nanostructures von Ezhovskii, Yu. K., Pavlov, D. V.

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