Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation von Iacopi, F., Travaly, Y., Eyckens, B., Waldfried, C., Abell, T., Guyer, E. P., Gage, D. M., Dauskardt, R. H., Sajavaara, T., Houthoofd, K., Grobet, P., Jacobs, P., Maex, K.

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Performance improvement of tall triple gate devices with strained SiN layers von Collaert, N., De Keersgieter, A., Anil, K.G., Rooyackers, R., Eneman, G., Goodwin, M., Eyckens, B., Sleeckx, E., de Marneffe, J.-F., De Meyer, K., Absil, P., Jurczak, M., Biesemans, S.

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The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNxCy films von Martin Hoyas, A., Travaly, Y., Schuhmacher, J., Sajavaara, T., Whelan, C. M., Eyckens, B., Richard, O., Giangrandi, S., Brijs, B., Vandervorst, W., Maex, K., Celis, J. P., Jonas, A. M., Vantomme, A.

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Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey von DEWEERD, W, KAUSHIK, V, DE GENDT, S, HEYNS, M, CHEN, J, SHIMAMOTO, Y, SCHRAM, T, RAGNARSSON, L.-A, DELABIE, A, PANTISANO, L, EYCKENS, B, MAES, J. W

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Potential remedies for the V T/ V fb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey von Deweerd, W., Kaushik, V., Chen, J., Shimamoto, Y., Schram, T., Ragnarsson, L.-Å., Delabie, A., Pantisano, L., Eyckens, B., Maes, J.W., De Gendt, S., Heyns, M.

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Impact of LKD5109™ low- k to cap/liner interfaces in single damascene process and performance von Iacopi, F., Patz, M., Vos, I., To&#x030B, kei, Zs, Sijmus, B., Le, Q.T., Sleeckx, E., Eyckens, B., Struyf, H., Das, A., Maex, K.

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Impact of material/process interactions on the properties of a porous CVD-O3 low-k dielectric film von TRAVALY, Y, EYCKENS, B, SCHAEKERS, M, BENDER, H, ROSSEEL, E, VANHAELEMEERSCH, S, MAEX, K, GAILLARD, F, VAN AUTRYVE, L, RABINZOHN, P, CARBONEL, L, ROTHSCHILD, A, LE, Q. T, BRONGERSMA, S. H, CIOFI, I, STRUYF, H, FURUKAWA, Y, STUCCHI, M

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Performance Enhancement of MUGFET Devices Using Super Critical Strained-SOI (SC-SSOI) and CESL von Collaert, N., Rooyackers, R., Clemente, F., Zimmerman, P., Cayrefourcq, I., Ghyselen, B., San, K., Eyckens, B., Jurczak, M., Biesemans, S.

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The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited W N x C y films von Martin Hoyas, A., Travaly, Y., Schuhmacher, J., Sajavaara, T., Whelan, C. M., Eyckens, B., Richard, O., Giangrandi, S., Brijs, B., Vandervorst, W., Maex, K., Celis, J. P., Jonas, A. M., Vantomme, A.

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The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNₓCy films von Martin Hoyas, A, Travaly, Y, Schuhmacher, J, Sajavaara, T, Whelan, C.M, Eyckens, B, Richard, O, Giangrandi, Simone, Brijs, B, Vandervorst, Wilfried, Maex, Karen, Celis, Jean-Pierre, Jonas, A.M, Vantomme, André

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3D integration by Cu-Cu thermo-compression bonding of extremely thinned bulk-Si die containing 10 μm pitch through-Si vias von Swinnen, B., Ruythooren, W., De Moor, P., Bogaerts, L., Carbonell, L., De Munck, K., Eyckens, B., Stoukatch, S., Tezcan, D.S., Tokei, Z., Vaes, J., Van Aelst, J., Beyne, E.

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Impact of material/process interactions on the properties of a porous CVD-O sub(3) low-k dielectric film von Travaly, Y, Eyckens, B, Carbonel, L, Rothschild, A, Le, Q T, Brongersma, S H, Ciofi, I, Struyf, H, Furukawa, Y, Stucchi, M, Schaekers, M, Bender, H, Rosseel, E, Vanhaelemeersch, S, Maex, K

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Impact of material/process interactions on the properties of a porous CVD-O 3 low-k dielectric film von Travaly, Y, Eyckens, B, Carbonel, L, Rothschild, A, Le, Q.T, Brongersma, S.H, Ciofi, I, Struyf, H, Furukawa, Y, Stucchi, M, Schaekers, M, Bender, H, Rosseel, E, Vanhaelemeersch, S, Maex, K, Gaillard, F, Van Autryve, L, Rabinzohn, P

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A Novel CMP-Less Integration Scheme For Dual Work Function Ni-FUSI CMOS von Kubicek, S., de Marneffe, J.-F., Vrancken, C., Chiarella, T., Kerner, C., Mertens, S., Eyckens, B., Delabie, A., Veloso, A., Hoffman, T., Lauwers, A., Kittl, J.A., Jurczak, M., Biesemans, S., Absil, P.P.

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Integration of Single Damascene 85/85 nm L/S copper trenches in Black Diamond using 193 nm optical lithography with dipole illumination von Van Olmen, J., Wu, W., Van Hove, M., Travaly, Y., Brongersma, S.H., Eyckens, B., Maenhoudt, M., Van Aelst, J., Struyf, H., Demuynck, S., Tokei, Z., Vervoort, I., Sijmus, B., Vos, I., Ciofi, I., Stucchi, M., Maex, K., Iacopi, F.

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Examining the Role of Aryldiazonium Salts in Surface Electroinitiated Polymerization von Stanfield, Melissa K, Dilger, Melvin, Hayne, David J, Emonson, Nicholas S, Barlow, Anders, Boase, Nathan R. B, Gahan, Lawrence R, Krenske, Elizabeth H, Pinson, Jean, Eyckens, Daniel J, Henderson, Luke C

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Cancer survival in Europe 1999–2007 by country and age: results of EUROCARE-5—a population-based study von De Angelis, Roberta, MSc, Sant, Milena, MD, Coleman, Michel P, Prof, Francisci, Silvia, PhD, Baili, Paolo, MSc, Pierannunzio, Daniela, PhD, Trama, Annalisa, MD, Visser, Otto, MD, Brenner, Hermann, Prof, Ardanaz, Eva, MD, Bielska-Lasota, Magdalena, Prof, Engholm, Gerda, MSc, Nennecke, Alice, MD, Siesling, Sabine, PhD, Berrino, Franco, MD, Capocaccia, Riccardo, MSc

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Prognoses and improvement for head and neck cancers diagnosed in Europe in early 2000s: The EUROCARE-5 population-based study von Gatta, Gemma, Botta, Laura, Sánchez, María José, Anderson, Lesley Ann, Pierannunzio, Daniela, Licitra, Lisa

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Childhood cancer survival in Europe 1999–2007: results of EUROCARE-5—a population-based study von Gatta, Gemma, MD, Botta, Laura, MSc, Rossi, Silvia, MSc, Aareleid, Tiiu, PhD, Bielska-Lasota, Magdalena, MD, Clavel, Jacqueline, MD, Dimitrova, Nadya, PhD, Jakab, Zsuzsanna, PhD, Kaatsch, Peter, MD, Lacour, Brigitte, MD, Mallone, Sandra, MSc, Marcos-Gragera, Rafael, PhD, Minicozzi, Pamela, PhD, Sánchez-Pérez, Maria-José, PhD, Sant, Milena, MD, Santaquilani, Mariano, IT, Stiller, Charles, MSc, Tavilla, Andrea, MSc, Trama, Annalisa, PhD, Visser, Otto, PhD, Peris-Bonet, Rafael, Prof

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Survival of women with cancers of breast and genital organs in Europe 1999–2007: Results of the EUROCARE-5 study von Sant, Milena, Chirlaque Lopez, Maria Dolores, Agresti, Roberto, Sánchez Pérez, Maria José, Holleczek, Bernd, Bielska-Lasota, Magdalena, Dimitrova, Nadya, Innos, Kaire, Katalinic, Alexander, Langseth, Hilde, Larrañaga, Nerea, Rossi, Silvia, Siesling, Sabine, Minicozzi, Pamela

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