Treffer 1 - 2 von 2 für Suche 'Elichiro, Shiba', Suchdauer: 0,47s Treffer weiter einschränken
  1. 1
    Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

    Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films von Peter, Antony Premkumar, Marquez, Alfonso Sepulveda, Meersschaut, Johan, Dara, Praveen, Blanquart, Timothee, Tomomi, Takayama, Taishi, Ebisudani, Elichiro, Shiba, Kimura, Yosuke, van Gompel, Sander, Morin, Pierre


    Volltext
    Artikel

    Zu den Favoriten
    Gespeichert in:
  2. 2
    Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

    Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films von Peter, Antony Premkumar, Sepulveda Marquez, Alfonso, Meersschaut, Johan, Dara, Praveen, Blanquart, Timothee, Tomomi, Takayama, Taishi, Ebisudani, Elichiro, Shiba, Kimura, Yosuke, Gompel, Sander van, Morin, Pierre


    Volltext
    Artikel

    Zu den Favoriten
    Gespeichert in:

Suchwerkzeuge: