Treffer 1 - 4 von 4 für Suche 'El Chemali, Chadi', Suchdauer: 0,32s Treffer weiter einschränken
  1. 1
    Run-to-run critical dimension and sidewall angle lithography control using the PROLITH simulator

    Run-to-run critical dimension and sidewall angle lithography control using the PROLITH simulator von Chemali, C.E., Freudenberg, J., Hankinson, M., Bendik, J.J.


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  2. 2
    Critical dimension control of a plasma etch process by integrating feedforward and feedback run-to-run control

    Critical dimension control of a plasma etch process by integrating feedforward and feedback run-to-run control von El Chemali, Chadi, Freudenberg, Jim, Hankinson, Matt, Collison, Wenli, Ni, Tom


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  3. 3
    Multizone uniformity control of a chemical mechanical polishing process utilizing a pre- and postmeasurement strategy

    Multizone uniformity control of a chemical mechanical polishing process utilizing a pre- and postmeasurement strategy von El Chemali, Chadi, Moyne, James, Khan, Kareemullah, Nadeau, Rock, Smith, Paul, Colt, John, Chapple-Sokol, Jonathan, Parikh, Tarun


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  4. 4
    Yield improvement at the contact process through run-to-run control

    Yield improvement at the contact process through run-to-run control von Khan, K., El Chemali, C., Moyne, J., Chapple-Sokol, J., Nadeau, R., Smith, P., Colt, J., Parikh, T.


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