METHOD FOR PLACING NANO-DIAMONDS WITH NV-CENTERS ON SILICON NITRIDE von Zubkova Evgeniya Vitalevna, Goltsman Grigorij Naumovich, An Pavel Pavlovich, Vorobev Vadim Vladislavovich, Akimov Aleksej Vladimirovich, Elmanov Ilya Aleksandrovich, Dzhavadzade Dzhavid Namik ogly, Kovalyuk Vadim Viktorovich, Komrakova Sofiya Andreevna, Bolshedvorskij Stepan Viktorovich, Soshenko Vladimir Vladimirovich, Elmanova Anna Valerevna

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