Modeling of light scattering in different regimes of surface roughness von Schröder, Sven, Duparré, Angela, Coriand, Luisa, Tünnermann, Andreas, Penalver, Dayana H, Harvey, James E

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Instrument for close-to-process light scatter measurements of thin film coatings and substrates von von Finck, Alexander, Hauptvogel, Matthias, Duparré, Angela

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Optical interference coatings measurement problem 2019 [Invited] von Trost, Marcus, Duparré, Angela, Ristau, Detlev, Schröder, Sven

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Angle-resolved scattering: an effective method for characterizing thin-film coatings von Schröder, Sven, Herffurth, Tobias, Blaschke, Holger, Duparré, Angela

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Optical interference coatings measurement problem 2013 [invited] von Duparré, Angela, Ristau, Detlev

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Optical Interference Coatings 2010 Measurement Problem von Duparré, Angela, Ristau, Detlev

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Characterization of optical coatings using a multisource table-top scatterometer von von Finck, Alexander, Herffurth, Tobias, Schröder, Sven, Duparré, Angela, Sinzinger, Stefan

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Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources von Trost, Marcus, Schröder, Sven, Duparré, Angela, Risse, Stefan, Feigl, Torsten, Zeitner, Uwe D, Tünnermann, Andreas

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Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers von Trost, Marcus, Schröder, Sven, Feigl, Torsten, Duparré, Angela, Tünnermann, Andreas

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Evaluation of subsurface damage by light scattering techniques von Trost, Marcus, Herffurth, Tobias, Schmitz, David, Schröder, Sven, Duparré, Angela, Tünnermann, Andreas

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Spectral angle resolved scattering of thin film coatings von Schröder, Sven, Unglaub, David, Trost, Marcus, Cheng, Xinbin, Zhang, Jinlong, Duparré, Angela

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Origins of light scattering from thin film coatings von Schröder, Sven, Trost, Marcus, Garrick, Méabh, Duparré, Angela, Cheng, Xinbin, Zhang, Jinlong, Wang, Zhanshan

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Angle-resolved scattering: an effective method for characterizing thin-film coatings von Schröder, Sven, Herffurth, Tobias, Blaschke, Holger, Duparré, Angela

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Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components von Duparré, Angela, Ferre-Borrull, Josep, Gliech, Stefan, Notni, Gunther, Steinert, Jörg, Bennett, Jean M

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Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis von Schröder, Sven, Herffurth, Tobias, Trost, Marcus, Duparré, Angela

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Scattering reduction through oblique multilayer deposition von Trost, Marcus, Herffurth, Tobias, Schröder, Sven, Duparré, Angela, Tünnermann, Andreas

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Optical interference coatings 2007 measurement problem von Duparré, Angela, Ristau, Detlev

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Open questions in surface topography measurement: a roadmap von Leach, Richard, Evans, Christopher, He, Liangyu, Davies, Angela, Duparré, Angela, Henning, Andrew, Jones, Christopher W, O'Connor, Daniel

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Definition of roughness structures for superhydrophobic and hydrophilic optical coatings on glass von Coriand, Luisa, Mitterhuber, Monika, Duparré, Angela, Tünnermann, Andreas

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EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates von Schröder, Sven, Feigl, Torsten, Duparré, Angela, Tünnermann, Andreas

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