Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy von Donnelly, V M

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Plasma enhanced layer-by-layer deposition and nanocrystallization of hydrogenated amorphous silicon films von Chen, Zhuo, Mucha, John A., Donnelly, Vincent M., Economou, Demetre J.

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Surprising importance of photo-assisted etching of silicon in chlorine-containing plasmas von Shin, Hyungjoo, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J.

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Spatially resolved diagnostics of an atmospheric pressure direct current helium microplasma von Wang, Qiang, Koleva, Ivanka, Donnelly, Vincent M, Economou, Demetre J

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Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses von Diomede, Paola, Economou, Demetre J., Donnelly, Vincent M.

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Rapid calculation of the ion energy distribution on a plasma electrode von Diomede, Paola, Economou, Demetre J., Donnelly, Vincent M.

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Effect of titanium contamination on oxygen atom recombination probability on plasma conditioned surfaces von Srivastava, Ashutosh K., Khare, Rohit, Donnelly, Vincent M.

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Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature von Donnelly, V. M., Malyshev, M. V.

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Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions von Malyshev, M. V., Donnelly, V. M.

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Diagnostics of inductively coupled chlorine plasmas: Measurement of electron and total positive ion densities von Malyshev, M. V., Donnelly, V. M.

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Recombination Reactions of Oxygen Atoms on an Anodized Aluminum Plasma Reactor Wall, Studied by a Spinning Wall Method von Kurunczi, P. F, Guha, J, Donnelly, V. M

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Plasma-surface reactions at a spinning wall von Kurunczi, P F, Guha, J, Donnelly, V M

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Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy von Chang, J. P., Green, M. L., Donnelly, V. M., Opila, R. L., Eng, J., Sapjeta, J., Silverman, P. J., Weir, B., Lu, H. C., Gustafsson, T., Garfunkel, E.

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Extraction of a nearly monoenergetic ion beam using a pulsed plasma von Xu, Lin, Economou, Demetre J., Donnelly, Vincent M., Ruchhoeft, Paul

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Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis von Fuller, N C M, Malyshev, M V, Donnelly, V M, Herman, Irving P

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Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical em... von Donnelly, V. M., Schabel, M. J.

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Nanopantography:  A New Method for Massively Parallel Nanopatterning over Large Areas von Xu, Lin, Vemula, Sri C, Jain, Manish, Nam, Sang Ki, Donnelly, Vincent M, Economou, Demetre J, Ruchhoeft, Paul

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Electron temperatures of inductively coupled Cl 2 –Ar plasmas von Fuller, N. C. M., Donnelly, Vincent M., Herman, Irving P.

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Dynamics of pulsed-power chlorine plasmas von Malyshev, M. V., Donnelly, V. M., Colonell, J. I., Samukawa, S.

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Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled fluorocarbon/rare gas plasmas using optical emission spectroscopy von Schabel, M. J., Donnelly, V. M., Kornblit, A., Tai, W. W.

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