CNx film characterization by surface sensitive methods: XPS and XAES von Dementjev, A.P, de Graaf, A, Dolgiy, D.I, Olshanski, E.D, Shulga, Y.M, Serov, A.A

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CN x film characterization by surface sensitive methods: XPS and XAES von Dementjev, A.P, de Graaf, A, Dolgiy, D.I, Olshanski, E.D, Shulga, Y.M, Serov, A.A

Volltext