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Density multiplication of nanostructures fabricated by ultralow voltage electron beam lithography using PMMA as positive- and negative-tone resist
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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Deposition rate model of magnetron sputtered particles
Veröffentlicht in Thin solid films
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Sheath structure of an electronegative plasma with cold positive ions
Veröffentlicht in IEEE transactions on plasma science
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