0.13 \mu m SiGe BiCMOS Technology Fully Dedicated to mm-Wave Applications von Avenier, G., Diop, M., Chevalier, P., Troillard, G., Loubet, N., Bouvier, J., Depoyan, L., Derrier, N., Buczko, M., Leyris, C., Boret, S., Montusclat, S., Margain, A., Pruvost, S., Nicolson, S.T., Yau, K.H.K., Revil, N., Gloria, D., Dutartre, D., Voinigescu, S.P., Chantre, A.

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Vertical profile optimization for +400 GHz fMAX Si/SiGe:C HBTs von Lacave, T, Chevalier, P, Campidelli, Y, Buczko, M, Depoyan, L, Berthier, L, Avenier, G, Gaquière, C, Chantre, A

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A conventional double-polysilicon FSA-SEG Si/SiGe:C HBT reaching 400 GHz fMAX von Chevalier, P., Pourchon, F., Lacave, T., Avenier, G., Campidelli, Y., Depoyan, L., Troillard, G., Buczko, M., Gloria, D., Celi, D., Gaquiere, C., Chantre, A.

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0.13mu$ m SiGe BiCMOS Technology Fully Dedicated to mm-Wave Applications von Voinigescu, S P, Revil, N, Chevalier, P, Pruvost, S, Bouvier, J, Avenier, G, Troillard, G, Depoyan, L, Buczko, M, Montusclat, S, Margain, A, Nicolson, S T, Yau, K.H.K., Gloria, D, Chantre, A, Diop, M, Loubet, N, Derrier, N, Leyris, C

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0.13 [Formula Omitted]m SiGe BiCMOS Technology Fully Dedicated to mm-Wave Applications von Avenier, G, Diop, M, Chevalier, P, Troillard, G, Loubet, N, Bouvier, J, Depoyan, L, Derrier, N, Buczko, M, Leyris, C, Boret, S, Montusclat, S, Margain, A, Pruvost, S, Nicolson, S.T, Yau, K.H.K, Revil, N, Gloria, D, Dutartre, D, Voinigescu, S.P, Chantre, A

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0.13μm SiGe BiCMOS technology for mm-wave applications von Avenier, G., Chevalier, P., Troillard, G., Vandelle, B., Brossard, F., Depoyan, L., Buczko, M., Boret, S., Montusclat, S., Margain, A., Pruvost, S., Nicolson, S.T., Yau, K.H.K., Gloria, D., Dutartre, D., Voinigescu, S.P., Chantre, A.

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65 nm Device Manufacture Using Shaped E-Beam Lithography von Pain, Laurent, Jurdit, Murielle, Laplanche, Yves, Todeschini, Jérôme, Leininger, Hugues, Tourniol, Sonia, Faure, Romuald, Bossy, Xavier, Palla, Ramiro, Beverina, Alessio, Broekaart, Marcel, Judong, Fabienne, Brosselin, Karine, Depoyan, Linda, Friec, Yannick Le, Leverd, Francois, Jonghe, Veronique De, Josse, Emmanuelle, Hinsinger, Olivier, Brun, Philippe, Henry, Daniel, Woo, Michael, Stolk, Peter, Tavel, Brice, Arnaud, Franck

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