Fabrication process and noise properties of antenna-coupled microbolometers based on superconducting YBCO films von Karmanenko, S F, Semenov, A A, Khrebtov, I A, Leonov, V N, Johansen, T H, Galperin, Yu M, Bobyl, A V, Dedoboretz, A I, Gaevski, M E, Lunev, A V, Suris, R A

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Fabrication process and noise properties of antenna-coupled microbolometers based on superconducting YBCO films von KARMANENKO, S. F, SEMENOV, A. A, SURIS, R. A, KHREBTOV, I. A, LEONOV, V. N, JOHANSEN, T. H, GALPERIN, Yu. M, BOBYL, A. V, DEDOBORETZ, A. I, GAEVSKILL, M. E, LUNEV, A. V

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