Characterization of ultra-shallow p + -n junctions formed by plasma doping with BF 3 and N 2 plasmas von Felch, S.B., Lee, B.S., Daryanani, S.L., Downey, D.F., Matyi, R.J.

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Characterization of ultra-shallow p+-n junctions formed by plasma doping with BF3 and N2 plasmas von FELCH, S. B, LEE, B. S, DARYANANI, S. L, DOWNEY, D. F, MATYI, R. J

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Integrated inversion channel optoelectronic devices and circuit elements for multifunctional array applications von Taylor, G.W., Evaldsson, P.A., Kiely, P.A., Vang, T., Claisse, P.R., Daryanani, S.L., Docter, D.P., Sargood, S.K., Cooke, P.W.

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The inversion channel resonant-cavity enhanced photodetector for two-dimensional optoelectronic array applications von Daryanani, S.L., Taylor, G.W., Sargood, S.K., Vang, T., Tell, B.

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