Electrostatic actuators with intrinsic stress gradient. I. Materials and structures von CHINTHAKINDI, Anil K, BHUSARI, Dhananjay, DUSCH, Brian P, MUSOLF, Jürgen, WILLEMSEN, Balam A, PROPHET, Eric, ROBERSON, Mark, KOHL, Paul A

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Recrystallization and intermetallic formation in Au/Al and Au/Zn bimetallic films von CHINTHAKINDI, Anil K, BHUSARI, Dhananjay, DUSCH, Brian P, KOHL, Paul A

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Electrostatic Actuators with Intrinsic Stress Gradient von Chinthakindi, Anil K., Bhusari, Dhananjay, Dusch, Brian P., Musolf, Jürgen, Willemsen, Balam A., Prophet, Eric, Roberson, Mark, Kohl, Paul A.

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Recrystallization and intermetalic formation in Au/Al and Au/Zn bimetallic films von Chinthakindi, Anil K, Bhusari, Dhananjay, Dusch, Brian P, Kohl, Paul A

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Multilayer planarization of polymer dielectrics von Chiniwalla, P., Manepalli, R., Farnsworth, K., Boatman, M., Dusch, B., Kohl, P., Bidstrup-Alen, S.A.

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Electron beam enhanced multilayering and planarization in preimidized polyimides von Manepalli, R., Kovach, D.J., Farnsworth, K., Chiniwalla, P., Dusch, B., Bidstrup-Allen, S.A., Kohl, P.A.

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