Vertical p-i-n polysilicon diode with antifuse for stackable field-programmable ROM von Herner, S.B., Bandyopadhyay, A., Dunton, S.V., Eckert, V., Gu, J., Hsia, K.J., Hu, S., Jahn, C., Kidwell, D., Konevecki, M., Mahajani, M., Park, K., Petti, C., Radigan, S.R., Raghuram, U., Vienna, J., Vyvoda, M.A.

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Polycrystalline silicon/CoSi2 Schottky diode with integrated SiO2 antifuse: a nonvolatile memory cell von Herner, S. B., Mahajani, M., Konevecki, M., Kuang, E., Radigan, S., Dunton, S. V.

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Oxidation of plasma-deposited α-SixC1-x : H films von ELDRIDGE, J. M, MOORE, J. O, OLIVE, G, DUNTON, V

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Oxidation of Plasma‐Deposited α ‐ Si x  C 1 − x  :  H  Films von Eldridge, J. M., Moore, J. O., Olive, G., Dunton, V.

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Three-dimensional thin-film-transistor silicon-oxide-nitride-oxide-silicon memory cell formed on large grain sized polysilicon films using nuclei induced solid phase crystallizatio... von Gu, S., Dunton, S. V., Walker, A. J., Nallamothu, S., Chen, E. H., Mahajani, M., Herner, S. B., Eckert, V. L., Hu, S., Konevecki, M., Petti, C., Radigan, S., Raghuram, U., Vyvoda, M. A.

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Methods for protecting patterned features during trench etch von RADIGAN STEVEN J, DUNTON SAMUEL V, RAGHURAM USHA, KONEVECKI MICHAEL W

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METHOD FOR REDUCING DIELECTRIC OVERETCH USING A DIELECTRIC ETCH STOP AT A PLANAR SURFACE von PETTI CHRISTOPHER J, DUNTON SAMUEL V, RAGHURAM USHA

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Method for reducing dielectric overetch using a dielectric etch stop at a planar surface von PETTI CHRISTOPHER J, DUNTON SAMUEL V, RAGHURAM USHA

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Method for reducing dielectric overetch using a dielectric etch stop at a planar surface von Dunton, Samuel V, Petti, Christopher J, Raghuram, Usha

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METHODS FOR PROTECTING PATTERNED FEATURES DURING TRENCH ETCH von RADIGAN STEVEN J, DUNTON SAMUEL V, RAGHURAM USHA, KONEVECKI MICHAEL W

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HIGH-DENSITY NONVOLATILE MEMORY ARRAY FABRICATED AT LOW TEMPERATURE COMPRISING SEMICONDUCTOR DIODES von HERNER S. BRAD, DUNTON SAMUEL V

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METHOD FOR REDUCING DIELECTRIC OVERETCH USING A DIELECTRIC ETCH STOP AT A PLANAR SURFACE von PETTI CHRISTOPHER J, DUNTON SAMUEL V, RAGHURAM USHA

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HIGH-DENSITY NONVOLATILE MEMORY ARRAY FABRICATED AT LOW TEMPERATURE COMPRISING SEMICONDUCTOR DIODES von HERNER, S. BRAD, DUNTON, SAMUEL V

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Method for cleaning slurry particles from a surface polished by chemical mechanical polishing von RADIGAN STEVEN J, DUNTON SAMUEL V

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Method for cleaning slurry particles from a surface polished by chemical mechanical polishing von Dunton, Samuel V, Radigan, Steven J

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Method for reducing dielectric overetch using a dielectric etch stop at a planar surface von PETTI CHRISTOPHER J, DUNTON SAMUEL V, RAGHURAM USHA

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Method for reducing dielectric overetch using a dielectric etch stop at a planar surface von Dunton, Samuel V, Raghuram, Usha, Petti, Christopher J

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Method to form topography in a deposited layer above a substrate von CHEN YUNG-TIN, DUNTON SAMUEL V

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Method to form topography in a deposited layer above a substrate von Chen, Yung-Tin, Dunton, Samuel V

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Method to minimize formation of recess at surface planarized by chemical mechanical planarization von HERNER S. BRAD, DUNTON SAMUEL V

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