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    Microelectromechanical actuators including sinuous beam structures

    Microelectromechanical actuators including sinuous beam structures von HILL, EDWARD ARTHUR, WOOD, ROBERT L, DHULER, VIJAYKUMAR RUDRAPPA, MAHADEVAN, RAMASWAMY, COWEN, ALLEN BRUCE

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    Microelectromechanical actuators including sinuous beam structures

    Microelectromechanical actuators including sinuous beam structures von HILL, EDWARD ARTHUR, WOOD, ROBERT L, DHULER, VIJAYKUMAR RUDRAPPA, MAHADEVAN, RAMASWAMY, COWEN, ALLEN BRUCE

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    Patent

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  3. 3
    Microelectromechanical actuators including sinuous beam structures

    Microelectromechanical actuators including sinuous beam structures von HILL, EDWARD ARTHUR, WOOD, ROBERT L, DHULER, VIJAYKUMAR RUDRAPPA, MAHADEVAN, RAMASWAMY, COWEN, ALLEN BRUCE

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    Patent

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