On the dynamics in chemical vapor deposition of InN von Hsu, Chih-Wei, Deminskyi, Petro, Persson, Anton, Karlsson, Matts, Pedersen, Henrik

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Direct epitaxial nanometer-thin InN of high structural quality on 4H–SiC by atomic layer deposition von Hsu, Chih-Wei, Deminskyi, Petro, Martinovic, Ivan, Ivanov, Ivan G., Palisaitis, Justinas, Pedersen, Henrik

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Area-Selective Atomic Layer Deposition Using an Inductively Coupled Plasma Polymerized Fluorocarbon Layer: A Case Study for Metal Oxides von Haider, Ali, Deminskyi, Petro, Khan, Talha M, Eren, Hamit, Biyikli, Necmi

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Atomic Layer Deposition of AlN on Graphene von Beshkova, Milena, Deminskyi, Petro, Hsu, Chih‐Wei, Shtepliuk, Ivan, Avramova, Ivalina, Yakimova, Rositsa, Pedersen, Henrik

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Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition von Haider, Ali, Deminskyi, Petro, Yilmaz, Mehmet, Elmabruk, Kholoud, Yilmaz, Ibrahim, Biyikli, Necmi

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Atomic layer deposition of InN using trimethylindium and ammonia plasma von Deminskyi, Petro, Rouf, Polla, Ivanov, Ivan G., Pedersen, Henrik

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Graphene as plasma-compatible blocking layer material for area-selective atomic layer deposition: A feasibility study for III-nitrides von Deminskyi, Petro, Haider, Ali, Kovalska, Evgeniya, Biyikli, Necmi

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Atomic layer deposition of AlN using trimethylaluminium and ammonia von Beshkova, M, Deminskyi, P, Pedersen, H, Yakimova, R

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Nanoscale selective area atomic layer deposition of TiO2 using e-beam patterned polymersElectronic supplementary information (ESI) available. See DOI: 10.1039/c6ra23923d von Haider, Ali, Yilmaz, Mehmet, Deminskyi, Petro, Eren, Hamit, Biyikli, Necmi

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METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSITION ASSEMBLY von Deminskyi, Petro, Dezelah, Charles, Shero, Eric James, Xie, Qi, Alessio Verni, Giuseppe

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METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING ALUMINUM, TITANIUM, AND CARBON von Raisanen, Petri, Deminskyi, Petro, Chen, Lifu, Dezelah, Charles, Xie, Qi, Shero, Eric James, Alessio Verni, Giuseppe

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METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSITION ASSEMBLY von Deminskyi, Petro, Dezelah, Charles, Shero, Eric James, Xie, Qi, Alessio Verni, Giuseppe

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METHODS OF FORMING STRUCTURES INCLUDING VANADIUM BORIDE AND VANADIUM PHOSPHIDE LAYERS von Deminskyi, Petro, Dezelah, Charles, Xie, Qi, Räisänen, Petri, Alessio Verni, Giuseppe, Van Druenen, Maart, Kim, Jiyeon

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Methods and systems for forming a layer comprising a Group 13 element on a substrate von DEZELAH, CHARLES, DEMINSKYI, PETRO, XIE, QI

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13 METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING A GROUP 13 ELEMENT ON A SUBSTRATE von XIE QI, DEMINSKYI PETRO, DEZELAH CHARLES

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METHOD OF FORMING STRUCTURES FOR THRESHOLD VOLTAGE CONTROL von Sippola, Perttu, Chang, Ren-Jie, Deminskyi, Petro, Dezelah, Charles, Xie, Qi, Alessio Verni, Giuseppe, Givens, Michael Eugene, Ivanova, Tatiana, Kim, Jiyeon, Shero, Eric

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13 METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING A TRANSITION METAL AND A GROUP 13 ELEMENT von VERNI GIUSEPPE ALESSIO, XIE QI, VAN DRUENEN MAART, CHEN LIFU, DEMINSKYI PETRO, CHANG REN JIE, DEZELAH CHARLES

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METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING ALUMINUM TITANIUM AND CARBON von VERNI GIUSEPPE ALESSIO, RAISANEN PETRI, XIE QI, CHEN LIFU, SHERO ERIC JAMES, DEMINSKYI PETRO, DEZELAH CHARLES

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METHOD OF FORMING STRUCTURES FOR THRESHOLD VOLTAGE CONTROL von VERNI GIUSEPPE ALESSIO, SIPPOLA PERTTU, SHERO ERIC, XIE QI, KIM JIYEON, DEMINSKYI PETRO, CHANG REN JIE, IVANOVA TATIANA, GIVENS MICHAEL EUGENE, DEZELAH CHARLES

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RADIATING MATRIX HETEROEPITAXIAL STRUCTURE von MASOL IHOR VITALIIOVYCH, OSINSKYI VOLODYMYR IVANOVYCH, DEMINSKYI PETRO VITALIIOVYCH, LIAKHOVA NATALIIA MYKOLAIOVNA

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