On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F + coimplanted silicon von Giles, Luis Felipe, Stapelmann, Chris, Cerva, Hans, Jahnel, Franz, Demeurisse, Caroline, Vrancken, Christa, Hoffmann, Thomas

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Ni fully silicided gates for 45 nm CMOS applications von Kittl, Jorge A., Lauwers, Anne, Pawlak, Malgorzata A., van Dal, Mark J.H., Veloso, Anabela, Anil, K.G., Pourtois, Geoffrey, Demeurisse, Caroline, Schram, Tom, Brijs, Bert, de Potter, Muriel, Vrancken, Christa, Maex, Karen

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Post Salicidation Clean: Selective Removal of Un-Reacted NiPt Towards NiPtSi(Ge) von Xu, Kaidong, Lauwers, Anne, Vos, Rita, Archer, Leo, Kraus, Harald, Demeurisse, Caroline, Mertens, Sofie, Henry, Sally-Ann, Gale, G., Mertens, P., Kovacs, Frederic, Dalmer, Michael, Gaulhofer, Ernst

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Study of Ni-Silicide Contacts to Si:C Source/Drain von Mertens, Sofie, Cho, Yonah, Nouri, Faran, Schreutelkamp, Robert, Kim, Yihwan, Verheyen, Peter, Steenbergen, Johnny, Vrancken, Christa, Bender, Hugo, Richard, Olivier, Van Daele, Benny, Vandervorst, Wilfried, Absil, Philip, Kubicek, Stefan, Demeurisse, Caroline, Tokei, Zsolt, Lauwers, Anne, Geenen, Luc

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Ni, Pt and Yb Based Fully Silicided (FUSI) Gates for Scaled CMOS Technologies von Kittl, Jorge A., Lauwers, Anne, van Dal, Mark, Yu, Hongyu, Veloso, Anabela, Hoffmann, Tom, Pawlak, Malgorzata, Demeurisse, Caroline, Kubicek, Stefan, Niwa, Masaaki, Vrancken, Christa, Absil, Philip, Biesemans, Serge

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Ni fully silicided gates for 45nm CMOS applications von Kittl, Jorge A., Lauwers, Anne, Pawlak, Malgorzata A., van Dal, Mark J.H., Veloso, Anabela, Anil, K.G., Pourtois, Geoffrey, Demeurisse, Caroline, Schram, Tom, Brijs, Bert, de Potter, Muriel, Vrancken, Christa, Maex, Karen

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Method for forming a self-aligned germanide structure von DEMEURISSE, CAROLINE, OPSOMER, KARL

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USE OF COMPOSITION, AQUEOUS COMPOSITION, FORMATION METHOD OF SELF-ALIGNING GERMANIDE AND SEMICONDUCTOR DEVICE von OPSOMER KARL, DEMEURISSE CAROLINE

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Method for formimg a self-aligned germanide structure von DEMEURISSE, CAROLINE, OPSOMER, KARL

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Method for forming a self-aligned germanide and devices obtained thereof von OPSOMER KARL, DEMEURISSE CAROLINE

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Post Salicidation Clean: Selective Removal of Un-Reacted NiPt Towards NiPtSi(Ge) von Xu, Kaidong, Lauwers, Anne, Vos, Rita, Archer, Leo, Demeurisse, Caroline, Mertens, Sofie, Kraus, Harald, Henry, Sally-Ann, Mertens, P., Kovacs, Frederic, Dalmer, Michael, Gaulhofer, Ernst

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Dopants for N and P Junctions in Germanium von Satta, Alessandra, Meuris, Marc, Janssens, Tom, Clarysse, Trudo, Simoen, Eddy, Demeurisse, Caroline, Brijs, Bert, Hoflijk, Ilse, Vandervorst, Wilfried

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Ni, Pt and Yb Based Fully Silicided (FUSI) Gates for Scaled CMOS Technologies von Kittl, Jorge A., Lauwers, Anne, van Dal, Mark, Yu, Hongyu, Veloso, Anabela, Hoffmann, Tom, Pawlak, Malgorzata, Demeurisse, Caroline, Kubicek, Stefan, Niwa, Masaaki, Vrancken, Christa, Absil, Philip, Biesemans, Serge

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Materials Issues of Ni Fully Silicided (FUSI) Gates for CMOS Applications von Kittl, Jorge, Lauwers, Anne, van Dal, Mark, Demeurisse, Caroline, Anil, K, Veloso, Anabela, Pawlak, Malgorzata, Cunniffe, J, Schram, Tom, Verbeeck, Rita, Christa, Vrancken, Kubicek, Stefan, Maex, Karen

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Study of Ni-Silicide Contacts to Si:C Source/Drain von Mertens, Sofie, Cho, Yonah, Nouri, Faran, Schreutelkamp, Robert, Kim, Yihwan, verheyen, Peter, Steenbergen, Johnny, Vrancken, Christa, Bender, Hugo, Richard, Olivier, Van Daele, Benny, Vandervorst, Wilfried, Absil, Philip, Kubicek, Stefan, Demeurisse, Caroline, Tokei, Zsolt, Lauwers, Anne

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L’expertise en situation von Albertazzi, Daniele, Arifon, Olivier, Bedin, Véronique, Bernard, Françoise, Bert, Jean-François, Bezon, Gisèle, Bouquet, Brigitte, Bouzon, Arlette, Courbières, Caroline, Couzinet, Viviane, Demeurisse, Josiane, Feigelson, Kristian, Fleury-Vilatte, Béatrice, Fraysse, Patrick, Gavillet, Isabelle, Granjon, Fabien, Guy, Daniel, Heinich, Nathalie, Koukoutsaki, Angeliki, Krieg, Alice, Lettieri, Carmela, Leveratto, Jean-Marc, Lochard, Guy, Lowy, Vincent, Martin-Juchat, Fabienne, Meyer, Vincent, Morais, Margarida, Paul-Cavallier, Marcel, Privat, Jean-Marie, Rafoni, Béatrice, Régimbeau, Gérard, Rouquette, Sébastien, Sanson, Pascal, Sjöberg, Lennart, Thanassekos, Yannis, Trépos, Jean-Yves, Vovou, Ioanna, Walter, Jacques, Wieviorka, Annette

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