Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices von Akatsu, Takeshi, Deguet, Chrystel, Sanchez, Loic, Allibert, Frédéric, Rouchon, Denis, Signamarcheix, Thomas, Richtarch, Claire, Boussagol, Alice, Loup, Virginie, Mazen, Frédéric, Hartmann, Jean-Michel, Campidelli, Yves, Clavelier, Laurent, Letertre, Fabrice, Kernevez, Nelly, Mazure, Carlos

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Review of Some Critical Aspects of Ge and GeOI Substrates von Clavelier, Laurent, Le Royer, Cyrille, Morand, Yves, Deguet, Chrystel, Vincent, B., Damlencourt, Jean-François, Hartmann, Jean-Michel, Kermarrec, O., Signamarcheix, T., Depuydt, B., Theuwis, Antoon, Quaeyhaegens, C., Cherkashin, N., Rivallin, P., Tabone, Claude, Lagrasta, S., Campidelli, Y., Descombes, S., Sanchez, L., Akastu, T., Rigny, A., Bensahel, D., Billon, Thierry, Kernevez, Nelly, Deleonibus, Simon

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Si exfoliation by MeV proton implantation von Braley, Carole, Mazen, Frédéric, Tauzin, Aurélie, Rieutord, François, Deguet, Chrystel, Ntsoenzok, Esidor

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High Mobility Materials on Insulator for Advanced Technology Nodes von Schwarzenbach, Walter, Figuet, Christophe, Delprat, Daniel, Veytizou, Christelle, Huyet, Isabelle, Tempesta, Catherine, Ecarnot, Ludovic, Widiez, Julie, Loup, Virginie, Hartmann, Jean-Michel, Besson, Pascal, Deguet, Chrystel, Mazen, Frédéric, Nguyen, Bich-Yen, Maleville, Christophe

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Germanium oxynitride (GeOxNy) as a back interface passivation layer for Germanium-on-insulator substrates von Signamarcheix, T., Allibert, F., Letertre, F., Chevolleau, T., Sanchez, L., Augendre, E., Deguet, C., Moriceau, H., Clavelier, L., Rieutord, F.

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LiNbO 3 Single Crystal Layer Transfer Techniques for High Performances RF Filters von Deguet, Chrystel, Pijolat, Mathieu, Blanc, Nicolas, Imbert, Bruno, Loubriat, Sebastien, Defay, Emmanuel, Ricart, Thibault, Clavelier, Laurent, Moulet, Jean Sebastien, Ghyselen, Bruno, Letertre, Fabrice, Ballandras, Sylvain

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Method for producing an electronic device von Deguet Chrystel, Fournel Franck

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PROCEDE DE REALISATION D'UN DISPOSITIF ELECTRONIQUE von DEGUET CHRYSTEL, FOURNEL FRANK

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Challenges and Progress in Germanium-on-Insulator Materials and Device Development towards ULSI Integration von Augendre, Emmanuel, Sanchez, Loïc, Benaissa, Lamine, Signamarcheix, Thomas, Hartmann, Jean-Michel, Le Royer, Cyrille, Vinet, Maud, Van Den Daele, William, Damlencourt, Jean-François, Romanjek, Krunoslav, Pouydebasque, Arnaud, Batude, Perrine, Tabone, Claude, Mazen, Frédéric, Tauzin, Aurélie, Blanc, Nicolas, Pellat, Michel, Dechamp, Jérôme, Zussy, Marc, Scheiblin, Pascal, Jaud, Marie-Anne, Drazek, Charlotte, Maurois, Cécile, Piccin, Matteo, Abbadie, Alexandra, Lallement, Fabrice, Daval, Nicolas, Guiot, Eric, Rigny, Arnaud, Ghyselen, Bruno, Bourdelle, Konstantin, Boulanger, Fabien, Cristoloveanu, Sorin, Billon, Thierry, Faynot, Olivier, Deguet, Chrystel, Clavelier, Laurent

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METHOD FOR PRODUCING AN ELECTRONIC DEVICE von FOURNEL Franck, DEGUET Chrystel

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Tuning the Electrostatic Properties of Silicon-on-Insulating Multilayer (SOIM) Structures von Kostrzewa, Marek, Nguyen, Tuan Quang, Mazellier, Jean-Paul, Deguet, Chrystel, Clavelier, Laurent, Landry, Karine, Cristoloveanu, Sorin

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Comparison of Different Etching Techniques in Order to Reveal Dislocations in Thick Ge Layers von Abbadie, Alexandra, Hartmann, Jean-Michel, Deguet, Chrystel, Sanchez, Loic, Brunier, F., Letertre, F

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Highly-Strained Silicon-On-Insulator Development von Akatsu, Takeshi, Hartmann, Jean-Michel, Aulnette, Cécile, Le Vaillant, Yves-Matthieu, Rouchon, Denis, Abbadie, Alexandra, Bogumilowicz, Yann, Portigliatti, Lionel, Colnat, Cyrille, Boudou, Nicolas, Lallement, Fabrice, Triolet, Fanny, Figuet, Christophe, Martinez, Muriel, Nguyen, Phuong, Delattre, Cécile, Tsyganenko, Kira, Berne, Cécile, Allibert, Frédéric, Deguet, Chrystel

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Method for making a thin-film element von DEGUET CHRYSTEL, CLAVELIER LAURENT

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Ge Diffusion in Strained Si / Relaxed SiGe Heterostrucutures von Bogumilowicz, Yann, Barnes, Jean-Paul, Holliger, Phillipe, Rouchon, Denis, Daval, Nicolas, Hartmann, Jean-Michel, Abbadie, Alexandra, Lallemand, Fabrice, Guiot, Eric, Akatsu, Takeshi, Deguet, Chrystel, Kernevez, Nelly

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ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME von REINHARDT, Alexandre, CLAVELIER, Laurent, DEFAY, Emmanuel, DEGUET, Chrystel

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METHOD FOR MAKING A THIN-FILM ELEMENT von CLAVELIER, LAURENT, DEGUET, CHRYSTEL

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Method for implanting a piezoelectric material von Imbert, Bruno, Moulet, Jean-Sebastien, Blanc, Nicolas, Deguet, Chrystel

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Method for manufacturing an acoustic-wave resonator including a suspended membrane von Imbert, Bruno, Pijolat, Mathieu, Defay, Emmanuel, Deguet, Chrystel, Moriceau, Hubert

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VERFAHREN ZUR AUFDECKUNG AUFTRETENDER KRISTALLVERSETZUNGEN IN EINEM KRISTALLINEN ELEMENT AUF GERMANIUMBASIS von SANCHEZ, LOIC, DEGUET, CHRYSTEL

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