A Soft-Landing Waveform for Actuation of a Single-Pole Single-Throw Ohmic RF MEMS Switch von Czaplewski, D.A., Dyck, C.W., Sumali, H., Massad, J.E., Kuppers, J.D., Reines, I., Cowan, W.D., Tigges, C.P.

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Poly-Silicon Based Latching RF MEMS Switch von Nordquist, C.D., Baker, M.S., Kraus, G.M., Czaplewski, D.A., Patrizi, G.A.

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A micromechanical flow sensor for microfluidic applications von Czaplewski, D.A., Ilic, B.R., Zalalutdinov, M., Olbricht, W.L., Zehnder, A.T., Craighead, H.G., Michalske, T.A.

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Nanomechanical switches for power saving in CMOS applications von CZAPLEWSKI, D. A, KRAUS, G. M, NORDQUIST, C. D

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Observation of locked intrinsic localized vibrational modes in a micromechanical oscillator array von Sato, M, Hubbard, B E, Sievers, A J, Ilic, B, Czaplewski, D A, Craighead, H G

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Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts von Czaplewski, David A, Nordquist, Christopher D, Dyck, Christopher W, Patrizi, Gary A, Kraus, Garth M, Cowan, William D

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100 keV electron backscattered range and coefficient for silicon von Czaplewski, David A., Ocola, Leonidas E.

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Study of intrinsic localized vibrational modes in micromechanical oscillator arrays von Sato, M., Hubbard, B. E., English, L. Q., Sievers, A. J., Ilic, B., Czaplewski, D. A., Craighead, H. G.

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Mechanical dissipation at elevated temperatures in tetrahedral amorphous carbon oscillators von Czaplewski, D.A., Sullivan, J.P., Friedmann, T.A., Wendt, J.R.

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In-channel micromechanical plate interacting with fluid flow von Czaplewski, D.A., Ilic, B., Zalalutdinov, M., Olbricht, W.L., Zehnder, A.T., Craighead, H.G., Michalske, T.A.

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