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  1. 1
    Elastic scattering cross sections and transport of tin ions in extreme ultraviolet lithography sources

    Elastic scattering cross sections and transport of tin ions in extreme ultraviolet lithography sources von Bartlett, Nathan, Herschberg, Andrew, Crouse, Jameson, Dallal, Tamar, Nuttal, Jake, Stahl, Jack, Braaksma, Niels, Ruzic, David

    Veröffentlicht in Physica scripta

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  2. 2
    Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

    Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization von Garza, Raquel, Bartlett, Nathan, Crouse, Jameson, Herschberg, Andrew, Mohan Sankaran, R., Amzad Hossain, Md, Ruzic, David N.


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