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  1. 1
    Evaluating the impact of process changes on cluster tool performance

    Evaluating the impact of process changes on cluster tool performance von Herrmann, J.W., Chandrasekaran, N., Conaghan, B.F., Nguyen, M.-Q., Rublof, G.W., Shi, R.Z.


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  2. 2
    Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment

    Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment von Herrmann, J.W., Conaghan, B.F., Henn-Lecordier, L., Mellacheruvu, P., Manh-Quan Nguyen, Rubloff, G.W., Shi, R.Z.

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