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    Effects of Titanium Sputtering Current on Structure and Morphology of TiZrN Films Prepared by Reactive DC Magnetron Co-Sputtering

    Effects of Titanium Sputtering Current on Structure and Morphology of TiZrN Films Prepared by Reactive DC Magnetron Co-Sputtering von Chinsakolthanakorn, Somchai, Buranawong, Adisorn, Chiyakun, Surasing, Limsuwan, Pichet


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