MEMS technology development and manufacturing in a CMOS foundry von Liu, C.M., Lin, Chung-Hsien, Chung, Tien-Kan, Chang, Kuei-Sung, Liu, Yi-Shao, Chou, Bruce C.S., Tsai, Robert Chin-Fu, Shen, Nick Y.M., Chen, Benior S.F., Cheng, Emerson C.W., Tuan, Hsiao Chin, Kalnitsky, Alex, Cheng, Sean

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