Study of the Electron Density in an Inductively Coupled Plasma of Fluorine-Hydrogen-Argon Gas Mixture von Sintsov, Sergey, Mansfeld, Dmitry, Preobrazhensky, Evgeny, Kornev, Roman, Chekamrev, Nikita, Viktorov, Mikhail, Ermakov, Artur, Vodopyanov, Alexander

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