Automated metrology qualification strategy [IC measurement] von Chain, E.E.

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Automated metrology for increased throughput and reliability von Chain, E.E.

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Spectrally selective black tungsten films von Thomas, L.K., Chain, E.E.

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Chemically vapor-deposited black molybdenum films of high IR reflectance and significant solar absorptance von Chain, E.E., Gesheva, K.A., Seraphin, B.O.

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On-product particle measurements for polysilicon process control von Chain, E.E., Barker, J.A., Placheck, V.E.

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Infrared optical properties of vanadium oxide thin films von Chain, E.E.

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In-line electrical probe for CD metrology below 0.5 /spl mu/m von Chain, E.E., Harris, T.A., Singh, B.P., Nagy, T., Merkel, W.

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Microstructural information related to thin film optical measurements von Chain, E.E, Byrne, D.M

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Optical properties of black molybdenum: Dependence on cermet composition, topology and surface texture von Chain, E.E., Seraphin, B.O.

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Highly reflecting molybdenum thin films having significant solar absorptance von Chain, E.E., Carver, G.E., Seraphin, B.O.

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Black molybdenum photothermal converter layers deposited by pyrolytic hydrogen reduction of MoO 2Cl 2 von Gesheva, K.A., Chain, E.E., Seraphin, B.O.

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On the mechanism of growth and the hydrogen reduction of CVD Black Molybdenum thin films von Seshan, K., Hillman, P.D., Gesheva, K.A., Chain, E.E., Seraphin, B.O.

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Black molybdenum photothermal converter layers deposited by pyrolytic hydrogen reduction of MoO2Cl2 von Gesheva, K.A., Chain, E.E., Seraphin, B.O.

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The genome of a motile marine Synechococcus von Palenik, B, Brahamsha, B, Larimer, F. W, Land, M, Hauser, L, Chain, P, Lamerdin, J, Regala, W, Allen, E. E, McCarren, J, Paulsen, I, Dufresne, A, Partensky, F, Webb, E. A, Waterbury, J

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